In-depth agglomeration of d -metals at Si-on-Mo interfaces

Journal of Applied Physics

Volumn 105, Issue 6, 2009, Pages

  Tsarfati, Tim ^a,b   Zoethout, Erwin ^a   Van De Kruijs, Robbert ^a   Bijkerk, Fred ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOUND FORMATIONS; FORMATION ENERGIES; METAL DIFFUSIONS; METAL SURFACES; MULTI-LAYER MIRRORS; SI LAYERS;

AGGLOMERATION; MOLYBDENUM; RHODIUM; SILICIDES; SURFACE CHEMISTRY;

SILICON;

EID: 63749088823     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3097753     Document Type: Article

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