Compact RF model for transient characteristics of MEMS capacitive switches

IEEE Transactions on Microwave Theory and Techniques

Volumn 57, Issue 1, 2009, Pages 237-242

  Halder, Subrata ^a   Palego, Cristiano ^b   Peng, Zhen ^b   Hwang, James C M ^b   Forehand, David I ^c   Goldsmith, Charles L ^c  

^a Anadigics Inc   (United States)

^b Lehigh University   (United States)

^c MEMtronics Inc   (United States)

Author keywords

Capacitance measurement; Electromechanical effects; Microelectromechanical devices; Microwave devices; Microwave measurements; Microwave switches

Indexed keywords

CAPACITIVE SWITCH; CIRCUIT DESIGNS; COMPACT MODEL; CONTROL WAVEFORMS; CONVENTIONAL APPROACH; DAMPING FACTORS; DESIGN AND SIMULATION; ELECTROMECHANICAL EFFECTS; MEMS CAPACITIVE SWITCH; MICRO-ELECTRO-MECHANICAL; MICROWAVE SWITCHES; PULL-IN; RELEASE PROCESS; RF MICROELECTROMECHANICAL SYSTEMS; SPRING CONSTANTS; TIME DOMAIN; TRANSIENT CHARACTERISTIC; VARIABLE MASS;

CAPACITANCE; CAPACITANCE MEASUREMENT; COMPOSITE MICROMECHANICS; ELECTRIC NETWORK ANALYSIS; ELECTROSTATIC ACTUATORS; INTEGRATED CIRCUIT MANUFACTURE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE DEVICES; MICROWAVE MEASUREMENT; MICROWAVES; TIME SWITCHES;

COMPUTER SIMULATION;

EID: 77956609722     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2008.2009039     Document Type: Conference Paper

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