An electromechanical model for MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2001, Pages 2123-2126

  Mercier, D ^a   Blondy, P ^a   Cros, D ^a   Guillon, P ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; EQUIVALENT CIRCUITS;

ELECTROMECHANICAL MODEL; MICROWAVE FREQUENCIES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035686461     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A parametric model of MEMS capacitive switch operating at microwave frequencies
2. Modeling of MEMS capacitive switches by TLM
3. Large-displacement modeling and simulation of micro-electromechanical electro-statically driven resonators using the harmonic balance method
4. Nonlinear dynamic modeling of micromachined microwave switches
5. Distributed MEMS transmission lines
6. Distributed MEMS transmission-line BPSK modulator