Nonlinear electro-mechanical modeling of MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2001, Pages 2119-2122

  Muldavin, Jeremy B ^a   Rebeiz, Gabriel M ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; EQUATIONS OF MOTION; SWITCHING; VELOCITY;

NONLINEAR ELECTRO-MECHANICAL MODELING; SWITCHING CURRENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0035686946     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. High isolation MEMS shunt switches; part 1: Modeling
2. A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz
3. Performance of low-loss RF MEMS capacitive switches
4. MEMS devices for high isolation switching and tunable filtering
5. Surface micromachined RF MEMS switches on GaAs substrates
6. Resonant-microbridge vapor sensor