Modelling and design of MEMS for RF and millimeter wave applications

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2002, Pages 13-18

  Dubuc, D ^a   Rabbia, L ^a   Saadaoui, M ^a   Flourens, E ^a   Ducarouge, B ^a   Aissi, M ^a   Boughriha, F ^a   Grenier, K ^a   Pons, P ^a   Graffeuil, J ^a   Plana, R ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MILLIMETER WAVES;

DESIGN METHOD; EM METHODS; MILLIMETER-WAVE APPLICATIONS; THERMAL METHODS;

DESIGN;

EID: 77958056257     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2002.1105791     Document Type: Conference Paper

References (8)

1. C. T.-C. Nguyen, "Micromachined circuits for wireless communications (invited)," Proceedings European Solid-State Devices Research Conference, Cork, Ireland, September 11-13, 2000, pp. 2-12. May 1994.
2. N.Bushyager et al "Modeling and Optimization of RFreconfigurable-Tuners with Computatioiially EfficientTime Domain Techniques" in Proc of MTT-S, pp 883-886,2002.
3. L.Pierantoni et al " Comparison of the efficiency of electromagnetic solvers in the time and frequency domain for the accurate modeling of planar circuits and MEMS" in Proc of MTT-S, pp 891-894,2002.
4. J. B. Muldavin and G. M. Rebeiz., "Nonlinearelectromechanical modeling of MEMS switches,"IEEE MITT-S Digest., pp. 2119-2122,2001.
5. T.Veijola et a1 "Gas Damping for a RF MEM switch and its dynamic characteristics" in Proc of M'IT-S, pp l2l3-1216,2002.
6. J.B.Rizk et al "Steady State Analysis and High Power Reliability Considerations of RF MEMS Capacitive switches" in Proc of MTT-S, pp 239-242, 2002.
7. W.Thiel et al "A study of Thermal Effect in RF MEM Switches using a Time Domain Approach" in Proc of MITT-S, pp 235-238,2002.
8. J. B. Muldavin and G. M. Rebeiz, "High-Isolation CPW MEMS shunt switches - Part 1: Modeling," IEEE Trans. Microwave Theory Tech., vol. 48, no. 6, pp. 1045-1052, June 2000.