Microwave intermodulation technique for monitoring the mechanical stress in RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2008, Pages 29-32

  Palego, Cristiano ^a   Hadler, Subrata ^a   Baloglu, Bora ^a   Peng, Zhen ^a   Hwang, James C M ^a   Nied, Herman F ^a   Forehand, David I ^b   Goldsmith, Charles L ^b  

^a LEHIGH UNIVERSITY   (United States)

^b MEMtronics Inc   (United States)

Author keywords

Intermodulation distortion; Microelectromechanical devices; Microwave devices; Microwave measurements; Microwave switches; Resonance; Stress; Stress control; Stress measurement; Switches

Indexed keywords

ELECTRIC SWITCHES; INTERMODULATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE DEVICES; MICROWAVES; Q FACTOR MEASUREMENT; RESONANCE; SUPERCONDUCTING DEVICES; TIME SWITCHES;

AIR DAMPING; ELECTRICAL DEGRADATIONS; IN VACUUMS; MECHANICAL RESONANCES; MECHANICAL STRESSES; MICROWAVE SWITCHES; QUALITY FACTORS; RESONANCE FREQUENCIES; RF MEMS CAPACITIVE SWITCHES; RF MEMS DEVICES; STRESS CONTROL; TEMPERATURE DEPENDENCES;

STRESSES;

EID: 57349096727     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2008.4633095     Document Type: Conference Paper

References (8)

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