System errors quantitative analysis of sample-scanning AFM

Ultramicroscopy

Volumn 105, Issue 1-4, 2005, Pages 336-342

  Tian, Xiaojun ^a,b,c   Xi, Ning ^a,d   Dong, Zaili ^a   Wang, Yuechao ^a  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b LIAONING UNIVERSITY OF TECHNOLOGY   (China)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^d Michigan State University   (United States)

Author keywords

Kinematics model; Sample scanning AFM; Scanning size error; Tube scanner; Vertical cross coupling error

Indexed keywords

DIFFRACTION GRATINGS; ERROR ANALYSIS; IMAGING TECHNIQUES; KINEMATICS; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; SCANNING;

KINEMATICS MODEL; SAMPLE-SCANNING AFM; SCANNING SIZE ERROR; VERTICAL CROSS COUPLING ERROR;

ATOMIC FORCE MICROSCOPY;

ANALYTICAL ERROR; ATOMIC FORCE MICROSCOPY; CALCULATION; CONFERENCE PAPER; IMAGING SYSTEM; KINEMATICS; MATHEMATICAL ANALYSIS; MOLECULAR MODEL; MOLECULAR PROBE; MOLECULAR SIZE; QUANTITATIVE ANALYSIS; SAMPLE; THICKNESS;

EID: 27544439449     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.06.046     Document Type: Conference Paper

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