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Volumn 479, Issue 1-2, 2005, Pages 193-200
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Deformation and fracture of Ti-Si-N nanocomposite films
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Author keywords
Focused ion beam (FIB); Nanostructures; Titanium nitride (TIN); Transmission electron microscopy (TEM)
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
DEFORMATION;
FRACTURE;
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
THERMODYNAMIC STABILITY;
TITANIUM COMPOUNDS;
TRANSMISSION ELECTRON MICROSCOPY;
WEAR RESISTANCE;
X RAY DIFFRACTION ANALYSIS;
FOCUSED ION BEAM (FIB);
GRIFFITH THEORY;
HALL-PETCH RELATIONSHIP;
NANOCOMPOSITE FILMS;
NANOINDENTATION;
METALLIC FILMS;
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EID: 15344342887
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2004.11.185 Document Type: Article |
Times cited : (37)
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References (38)
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