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Volumn 40, Issue 1, 2009, Pages 22-27

In-situ SEM indentation studies of the deformation mechanisms in TiN, CrN and TiN/CrN

Author keywords

Deformation modes; In situ SEM nanoindentation; Multilayer coating; Transition metal nitrides; Transmission electron microscopy (TEM) observations

Indexed keywords

CRYSTAL GROWTH; DEFORMATION; ELECTRONS; FILM PREPARATION; GRAIN BOUNDARIES; GRAIN BOUNDARY SLIDING; ION BOMBARDMENT; METALLIC FILMS; MICROCRYSTALLINE SILICON; MICROSCOPIC EXAMINATION; MICROSTRUCTURAL EVOLUTION; MICROSTRUCTURE; MULTILAYER FILMS; MULTILAYERS; NANOINDENTATION; NITRIDES; PILES; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; TRANSITION METALS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 54349083628     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2008.02.013     Document Type: Article
Times cited : (54)

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