Three dimensional imaging of deformation modes in TiN-based thin film coatings

Thin Solid Films

Volumn 515, Issue 6, 2007, Pages 3190-3195

  Ma, L W ^a   Cairney, J M ^a   McGrouther, D ^a   Hoffman, M ^a   Munroe, P R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

3 D image reconstruction; Focused ion beam microscopy; TiN coatings

Indexed keywords

CRACKS; IMAGE RECONSTRUCTION; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; PLASTIC DEFORMATION; TITANIUM NITRIDE;

BRITTLE COATINGS; DEFORMATION ZONE; FOCUSED ION BEAM MICROSCOPY; NANOINDENTATION;

THIN FILMS;

EID: 33846291342     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.034     Document Type: Article

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