SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 518, Issue 18, 2010, Pages 5349-5354

Influence of microstructure and hydrogen concentration on amorphous silicon crystallization

(5) Budini, N a Rinaldi, P A a Schmidt, J A a Arce, R D a Buitrago, R H a

a UNIVERSIDAD NACIONAL DEL LITORAL (Argentina)

Author keywords

Hydrogenated amorphous silicon; Polycrystalline silicon; Solid phase crystallization

Indexed keywords

AMORPHOUS MATRICES; CRYSTALLINE SILICONS; GLASS SUBSTRATES; HIGH FREQUENCY PLASMA; HYDROGEN CONCENTRATION; HYDROGENATED AMORPHOUS SILICON; NANO-CRYSTALLINE SILICON THIN FILMS; NUCLEATION AND GROWTH; POLY-CRYSTALLINE SILICON; SOLID PHASE CRYSTALLIZATION; SUBSTRATE TEMPERATURE; THERMAL-ANNEALING;

AMORPHOUS FILMS; CRYSTALLIZATION; HYDROGEN; HYDROGENATION; NANOCRYSTALLINE SILICON; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; X RAY DIFFRACTION;

AMORPHOUS SILICON;

EID: 77955656926 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.04.029 Document Type: Article

Times cited : (51)

References (36)

1
- 33747402611
- A.G. Aberle Thin Solid Films 511/512 2006 26
- (2006) Thin Solid Films , vol.511-512 , pp. 26
- Aberle, A.G.¹

2
- 36549098234
- R.B. Iverson, and R. Reif J. Appl. Phys. 62 1987 1675
- (1987) J. Appl. Phys. , vol.62 , pp. 1675
- Iverson, R.B.¹ Reif, R.²

3
- 77955664489
- G. Ivlev, E. Gatskevich, V. Cháb, J. Stuchlík, V. Vorlíček, and J. Kočka Appl. Phys. Lett. 75 1999 1498
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1498
- Ivlev, G.¹ Gatskevich, E.² Cháb, V.³ Stuchlík, J.⁴ Vorlíček, V.⁵ Kočka, J.⁶

4
- 0035247533
- S.Y. Yoon, S.J. Park, K.H. Kim, and J. Jang Thin Solid Films 383 2001 34
- (2001) Thin Solid Films , vol.383 , pp. 34
- Yoon, S.Y.¹ Park, S.J.² Kim, K.H.³ Jang, J.⁴

5
- 33746977215
- D. Song, D. Inns, A. Straub, M.L. Terry, P. Campbell, and A.G. Aberle Thin Solid Films 513 2006 356
- (2006) Thin Solid Films , vol.513 , pp. 356
- Song, D.¹ Inns, D.² Straub, A.³ Terry, M.L.⁴ Campbell, P.⁵ Aberle, A.G.⁶

6
- 0030563303
- T. Matsuyama, N. Nerada, T. Baba, T. Sawada, S. Tsuge, K. Wakisaka, and S. Tsuda J. Non-Cryst. Solids 198/200 1996 940
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 940
- Matsuyama, T.¹ Nerada, N.² Baba, T.³ Sawada, T.⁴ Tsuge, S.⁵ Wakisaka, K.⁶ Tsuda, S.⁷

7
- 0031271731
- R. Rüther, J. Livingstone, and N. Dytlewski Thin Solid Films 310 1997 67
- (1997) Thin Solid Films , vol.310 , pp. 67
- Rüther, R.¹ Livingstone, J.² Dytlewski, N.³

8
- 0012710138
- J.D. Ouwens, and R.E.I. Schropp Phys. Rev. B 54 1996 17759
- (1996) Phys. Rev. B , vol.54 , pp. 17759
- Ouwens, J.D.¹ Schropp, R.E.I.²

9
- 0038107166
- W. Beyer Sol. Energy Mater. Sol. Cells 78 2003 235
- (2003) Sol. Energy Mater. Sol. Cells , vol.78 , pp. 235
- Beyer, W.¹

10
- 36549101401
- K. Nakazawa, and K. Tanaka J. Appl. Phys. 68 1990 1029
- (1990) J. Appl. Phys. , vol.68 , pp. 1029
- Nakazawa, K.¹ Tanaka, K.²

11
- 0031165624
- H. Kim, K. Lee, and J. Lee Thin Solids Films 302 1997 17
- (1997) Thin Solids Films , vol.302 , pp. 17
- Kim, H.¹ Lee, K.² Lee, J.³

12
- 36448999409
- C. Godet, N. Layadi, and P. Roca i Cabarrocas Appl. Phys. Lett. 66 1995 3146
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3146
- Godet, C.¹ Layadi, N.² Roca Cabarrocas, I.P.³

13
- 22944446108
- F. Kail, A. Hadjadj, and P. Roca i Cabarrocas Thin Solid Films 487 2005 126
- (2005) Thin Solid Films , vol.487 , pp. 126
- Kail, F.¹ Hadjadj, A.² Roca Cabarrocas, I.P.³

14
- 0033898199
- S. Jia, H.C. Ge, X.H. Geng, and Z.P. Wang Sol. Energy Mater. Sol. Cells 62 2000 201
- (2000) Sol. Energy Mater. Sol. Cells , vol.62 , pp. 201
- Jia, S.¹ Ge, H.C.² Geng, X.H.³ Wang, Z.P.⁴

15
- 0036149593
- H.Y. Kim, Y.S. Kang, P.S. Lee, and J.Y. Lee Thin Solid Films 402 2002 296
- (2002) Thin Solid Films , vol.402 , pp. 296
- Kim, H.Y.¹ Kang, Y.S.² Lee, P.S.³ Lee, J.Y.⁴

16
- 25744447635
- R. Street Phys. Rev. B 43 1991 2454
- (1991) Phys. Rev. B , vol.43 , pp. 2454
- Street, R.¹

17
- 0020940620
- R. Swanepoel J. Phys. E: Sci. Instrum. 16 1983 1214
- (1983) J. Phys. E: Sci. Instrum. , vol.16 , pp. 1214
- Swanepoel, R.¹

18
- 33745935178
- M.H. Brodsky, M. Cardona, and J.J. Cuomo Phys. Rev. B 16 1977 3556
- (1977) Phys. Rev. B , vol.16 , pp. 3556
- Brodsky, M.H.¹ Cardona, M.² Cuomo, J.J.³

19
- 33847211355
- D.L. Young, P. Stradins, Y. Xu, L.M. Gedvilas, E. Iwaniczko, Y. Yan, H.M. Branz, and Q. Wang Appl. Phys. Lett. 90 2007 081923
- (2007) Appl. Phys. Lett. , vol.90 , pp. 081923
- Young, D.L.¹ Stradins, P.² Xu, Y.³ Gedvilas, L.M.⁴ Iwaniczko, E.⁵ Yan, Y.⁶ Branz, H.M.⁷ Wang, Q.⁸

20
- 0037429946
- A.H.M. Smets, W.M.M. Kessels, and M.C.M. van de Sanden Appl. Phys. Lett. 82 2003 1547
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1547
- Smets, A.H.M.¹ Kessels, W.M.M.² Van De Sanden, M.C.M.³

21
- 0032632546
- W. Beyer, and M.S. Abo Ghazala Mater. Res. Soc. Symp. Proc. 507 1998 601
- (1998) Mater. Res. Soc. Symp. Proc. , vol.507 , pp. 601
- Beyer, W.¹ Abo Ghazala, M.S.²

22
- 0242278038
- A.H. Mahan, J. Carapella, B.P. Nelson, R.S. Crandall, and I. Balberg J. Appl. Phys. 69 1991 6728
- (1991) J. Appl. Phys. , vol.69 , pp. 6728
- Mahan, A.H.¹ Carapella, J.² Nelson, B.P.³ Crandall, R.S.⁴ Balberg, I.⁵

23
- 0036530778
- S. Ray, S. Mukhopadhyay, T. Jana, and R. Carius J. Non-Cryst. Solids 299 2002 761
- (2002) J. Non-Cryst. Solids , vol.299 , pp. 761
- Ray, S.¹ Mukhopadhyay, S.² Jana, T.³ Carius, R.⁴

24
- 0000666103
- X. Jiang, B. Goranchev, K. Schmidt, P. Grünberg, and K. Reichelt J. Appl. Phys. 90 1990 6772
- (1990) J. Appl. Phys. , vol.90 , pp. 6772
- Jiang, X.¹ Goranchev, B.² Schmidt, K.³ Grünberg, P.⁴ Reichelt, K.⁵

25
- 33749606374
- C.R. Miranda, K.V. Tretiakov, and S. Scandolo J. Non-Cryst. Solids 352 2006 4283
- (2006) J. Non-Cryst. Solids , vol.352 , pp. 4283
- Miranda, C.R.¹ Tretiakov, K.V.² Scandolo, S.³

26
- 0001108725
- A.H. Mahan, L.M. Gedvilas, and J.D. Webb J. Appl. Phys. 87 2000 1650
- (2000) J. Appl. Phys. , vol.87 , pp. 1650
- Mahan, A.H.¹ Gedvilas, L.M.² Webb, J.D.³

27
- 77955654156
- J.A. Mcmillan, and E.M. Peterson J. Appl. Phys. 50 1979 5283
- (1979) J. Appl. Phys. , vol.50 , pp. 5283
- McMillan, J.A.¹ Peterson, E.M.²

28
- 31644449160
- A.H. Mahan, B. Roy, R.C. Reedy Jr., D.W. Readey, and D.S. Ginley J. Appl. Phys. 99 2006 023507
- (2006) J. Appl. Phys. , vol.99 , pp. 023507
- Mahan, A.H.¹ Roy, B.² Reedy Jr., R.C.³ Readey, D.W.⁴ Ginley, D.S.⁵

29
- 0025385830
- G. Harbeke, and L. Jastrzebski J. Electrochem. Soc. 137 1990 696
- (1990) J. Electrochem. Soc. , vol.137 , pp. 696
- Harbeke, G.¹ Jastrzebski, L.²

30
- 0000182211
- J. Robertson J. Appl. Phys. 87 2000 2608
- (2000) J. Appl. Phys. , vol.87 , pp. 2608
- Robertson, J.¹

31
- 0001080129
- S.Y. Yoon, S.J. Park, K.H. Kim, J. Jang, and C.O. Kim J. Appl. Phys. 87 2000 609
- (2000) J. Appl. Phys. , vol.87 , pp. 609
- Yoon, S.Y.¹ Park, S.J.² Kim, K.H.³ Jang, J.⁴ Kim, C.O.⁵

32
- 57649217599
- J.A. Schmidt, N. Budini, P.A. Rinaldi, R.D. Arce, and R.H. Buitrago J. Cryst. Growth 311 2008 54
- (2008) J. Cryst. Growth , vol.311 , pp. 54
- Schmidt, J.A.¹ Budini, N.² Rinaldi, P.A.³ Arce, R.D.⁴ Buitrago, R.H.⁵

33
- 49049135971
- G.W. Cullen, M.S. Abrahams, J.F. Corboy, M.T. Duffy, W.E. Ham, L. Jastrzebski, R.T. Smith, M. Blumenfeld, G. Harbeke, and J. Lagowski J. Cryst. Growth 56 1982 281
- (1982) J. Cryst. Growth , vol.56 , pp. 281
- Cullen, G.W.¹ Abrahams, M.S.² Corboy, J.F.³ Duffy, M.T.⁴ Ham, W.E.⁵ Jastrzebski, L.⁶ Smith, R.T.⁷ Blumenfeld, M.⁸ Harbeke, G.⁹ Lagowski, J.¹⁰

34
- 1842475303
- A. Straub, P.I. Widenborg, A. Sproul, Y. Huang, N. Harder, and A.G. Aberle J. Cryst. Growth 265 2004 168
- (2004) J. Cryst. Growth , vol.265 , pp. 168
- Straub, A.¹ Widenborg, P.I.² Sproul, A.³ Huang, Y.⁴ Harder, N.⁵ Aberle, A.G.⁶

35
- 70350707502
- C. Becker, F. Ruske, T. Sontheimer, B. Gorka, U. Bloeck, S. Gall, and B. Rech J. Appl. Phys. 106 2009 084506
- (2009) J. Appl. Phys. , vol.106 , pp. 084506
- Becker, C.¹ Ruske, F.² Sontheimer, T.³ Gorka, B.⁴ Bloeck, U.⁵ Gall, S.⁶ Rech, B.⁷

36
- 0036540421
- A. Fontcuberta i Morral, and P. Roca i Cabarrocas J. Non-Cryst. Solids 299/302 2002 196
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 196
- Fontcuberta i Morral, A.¹ Roca i Cabarrocas, P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.