Hydrogen diffusion and induced-crystallization in intrinsic and doped hydrogenated amorphous silicon films

Thin Solid Films

Volumn 487, Issue 1-2, 2005, Pages 126-131

  Kail, F ^a,b   Hadjadj, A ^b   Roca i Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

Author keywords

Amorphous silicon; Crystallization; Hydrogen diffusion; Microcrystalline silicon

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; DIFFUSION; DOPING (ADDITIVES); ELLIPSOMETRY; HYDROGEN; HYDROGENATION; SECONDARY ION MASS SPECTROMETRY;

HYDROGEN DIFFUSION; MICROCRYSTALLINE SILICON; POLYMORPHOUS; SILICON THIN FILMS;

THIN FILMS;

EID: 22944446108     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.049     Document Type: Conference Paper

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