Microvalves for natural-gas analysis with poly ether ether ketone membranes

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 973-981

  Nachef, Kinda ^a,b   Bourouina, Tarik ^a   Marty, Frdric ^a   Danaie, Kamran ^a   Bourlon, Bertrand ^a   Donzier, Eric ^a  

^a ESIEE PARIS   (France)

^b SCHLUMBERGER   (France)

Author keywords

Membrane; micro gas chromatography; microvalves; poly ether ether ketone (PEEK)

Indexed keywords

ADHESION ENERGY; ANISOTROPIC STRESS FIELD; BLISTER TEST; EXPERIMENTAL CHARACTERIZATION; GAS ANALYSIS; HARSH ENVIRONMENT; IN-PLANE; MEMBRANE MATERIAL; MICRO VALVES; MICRO-GAS CHROMATOGRAPHY; POLY ETHER ETHER KETONE (PEEK); STATIC AND DYNAMIC; TEMPERATURE CYCLES; YOUNG'S MODULUS;

COMPUTATIONAL FLUID DYNAMICS; ETHERS; GASES; HELIUM; KETONES; MECHANICAL PROPERTIES; MEMBRANES; PUMPS; STRESSES; VALVES (MECHANICAL);

GAS CHROMATOGRAPHY;

EID: 77955422006     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2055547     Document Type: Article

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