A hybrid PZT-silicon microvalve

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 488-497

  Duggirala, Rajesh ^a   Lal, Amit ^a  

^a Cornell University   (United States)

Author keywords

Magnetic extrusion; Microvalve; Piezoelectric unimorph

Indexed keywords

ELECTRIC POTENTIAL; LAMINAR FLOW; MICROACTUATORS; MICROMACHINING; PIEZOELECTRIC MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; REYNOLDS NUMBER; SILICON WAFERS;

MAGNETIC EXTRUSION; MICROVALVE; PIEZOELECTRIC UNIMORPH;

MICROELECTROMECHANICAL DEVICES;

EID: 22444432885     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844802     Document Type: Article

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