The pure-shear mode solidly mounted resonator based on c-axis oriented ZnO film

Applied Surface Science

Volumn 256, Issue 24, 2010, Pages 7638-7642

  Chen, Da ^a   Wang, Jingjing ^a   Xu, Yan ^a   Li, Dehua ^a   Li, Zhaoxin ^a   Song, Hongwei ^a  

^a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Film bulk acoustic resonator; Mass loading sensor; Shear mode; ZnO film

Indexed keywords

ACOUSTIC RESONATORS; BRAGG REFLECTORS; ELECTRIC FIELDS; FREQUENCY RESPONSE; II-VI SEMICONDUCTORS; METALLIC FILMS; Q FACTOR MEASUREMENT; REFLECTION; SHEAR FLOW; SILICA; ZINC OXIDE;

BIO-CHEMICAL APPLICATIONS; ELECTRIC FIELD COMPONENTS; FILM BULK ACOUSTIC RESONATORS; LATERAL ELECTRIC FIELD; MASS LOADINGS; SHEAR MODES; SOLIDLY MOUNTED RESONATOR; ZNO FILMS;

TUNGSTEN COMPOUNDS;

EID: 77955417579     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.06.020     Document Type: Article

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