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Volumn 54, Issue 8, 2007, Pages 1680-1685

Characteristics of pure-shear mode BAW resonators consisting of (112̄0) textured ZnO films

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING; FILM THICKNESS; TEMPERATURE MEASUREMENT; THIN FILMS; ZINC OXIDE;

EID: 34548133546     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.439     Document Type: Article
Times cited : (39)

References (18)
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  • 3
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  • 5
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    • art no. 173504
    • M. Benetti, D. Cannata, F. Di Pietrantonio, V. Foglietti, and E. Verona, "Microbalance chemical sensor based on thin-film bulk acoustic wave resonators," Appl. Phys. Lett., vol. 87, art. no. 173504, 2005.
    • (2005) Appl. Phys. Lett , vol.87
    • Benetti, M.1    Cannata, D.2    Di Pietrantonio, F.3    Foglietti, V.4    Verona, E.5
  • 7
    • 0001290363 scopus 로고
    • c-axis inclined ZnO piezoelectric shear wave films
    • J. S. Wang and K. M. Lakin, "c-axis inclined ZnO piezoelectric shear wave films," Appl. Phys. Lett., vol. 42, no. 4, pp. 352-354, 1983.
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  • 10
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    • Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators
    • J. Bjurström, G. Wingqvist, and I. Katardjiev, "Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, no. 11, pp. 2095-2100, 2006.
    • (2006) IEEE Trans. Ultrason., Ferroelect., Freq. Contr , vol.53 , Issue.11 , pp. 2095-2100
    • Bjurström, J.1    Wingqvist, G.2    Katardjiev, I.3
  • 11
    • 29144506296 scopus 로고    scopus 로고
    • Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges
    • T. Yanagitani, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, no. 11, pp. 2140-2145, 2005.
    • (2005) IEEE Trans. Ultrason., Ferroelect., Freq. Contr , vol.52 , Issue.11 , pp. 2140-2145
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  • 12
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    • T. Yanagitani, N. Mishima, M. Matsukawa, and Y. Watanabe, "Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 4, pp. 701-704, 2007.
    • (2007) IEEE Trans. Ultrason., Ferroelect., Freq. Contr , vol.54 , Issue.4 , pp. 701-704
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  • 13
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    • Elastic, dielectric, and piezoelectric properties of zincite in the 4.2-800°Ktemperature range
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  • 16
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  • 18
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.