Characteristics of pure-shear mode BAW resonators consisting of (112̄0) textured ZnO films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 8, 2007, Pages 1680-1685

  Yanagitani, Takahiko ^a,b   Kiuchi, Masato ^b   Matsukawa, Mami ^c   Watanabe, Yoshiaki ^c  

^a IEEE

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING; FILM THICKNESS; TEMPERATURE MEASUREMENT; THIN FILMS; ZINC OXIDE;

PURE-SHEAR MODES; TEMPERATURE COEFFICIENT OF FREQUENCY (TCF); TEXTURED ZNO FILMS;

RESONATORS;

EID: 34548133546     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.439     Document Type: Article

References (18)

1. R. Ruby, P. Bradley, J. D. Larson, III, and Y. Oshmyansky, "PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBAR)," Electron. Lett., vol. 35, pp. 794-795, 1999.
2. H. P. Loebl, C. Metzmacher, D. N. Peligrad, R. Mauczok, M. Klee, W. Brand, R. F. Milsom, P. Lok, F. van Straten, A. Tuinhout, and J. W. Lobeek, "Solidly mounted bulk acoustic wave filters for the GHz frequency range," in Proc. IEEE Ultrason. Symp., 2002, pp. 897-901.
3. T. Nishihara, T. Yokoyama, T. Miyashita, and Y. Satoh, "High performance and miniature thin film bulk acoustic wave filters for 5 GHz," in Proc. IEEE Ultrason. Symp., 2002, pp. 969-972.
4. K. M. Lakin, "Thin film resonator technology," in IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, no. 5, pp. 707-716, 2005.
5. M. Benetti, D. Cannata, F. Di Pietrantonio, V. Foglietti, and E. Verona, "Microbalance chemical sensor based on thin-film bulk acoustic wave resonators," Appl. Phys. Lett., vol. 87, art. no. 173504, 2005.
6. B. A. Auld, Acoustic Fields and Waves in Solids. 2nd ed. vol. 1, Malabar, FL: Krieger, 1990, p. 122.
7. J. S. Wang and K. M. Lakin, "c-axis inclined ZnO piezoelectric shear wave films," Appl. Phys. Lett., vol. 42, no. 4, pp. 352-354, 1983.
8. M. Link, M. Schreiter, J. Weber, R. Primig, D. Pitzer, and R. Gabi, "Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, no. 2, pp. 492-496, 2006.
9. F. Martin, M.-E. Jan, S. Rey-Mermet, B. Belgacem, D. Su, M. Cantoni, and P. Murait, "Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, no. 7, pp. 1339-1343, 2006.
10. J. Bjurström, G. Wingqvist, and I. Katardjiev, "Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, no. 11, pp. 2095-2100, 2006.
11. T. Yanagitani, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, no. 11, pp. 2140-2145, 2005.
12. T. Yanagitani, N. Mishima, M. Matsukawa, and Y. Watanabe, "Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 4, pp. 701-704, 2007.
13. E. F. Tokarev, I. B. Kobyakov, I. P. Kuz'mina, A. N. Lobachev, and G. S. Pado, "Elastic, dielectric, and piezoelectric properties of zincite in the 4.2-800°Ktemperature range," Sov. Phy. Solid State, vol. 17, pp. 629-632, 1975.
14. 3 plates and its applications to piezoelectric devices," in Proc. IEEE Ultrason. Symp., 1986, pp. 719-722.
15. T. Kawamoto, M. Matsukawa, Y. Watanabe, and T. Yanagitani, "Study on formation mechanism of (112̄0) textured ZnO films," in Proc. IEEE Ultrason. Symp., 2006, pp. 1529-1532.
16. W. P. Mason, Physical Acoustics, vol. 1, pt. A, New York: Academic, 1964.
17. S. Saitoh, M. Izumi, and Y. Mine, "A dual frequency ultrasonic probe for medical applications," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 42, no. 2, pp. 294-300, 1995.
18. R. T. Smith and V. E. Stubblefield, "Temperature dependence of the electroacoustical constants of Li-doped ZnO single crystals," J. Acoust. Soc. Amer., vol. 46, p. 105, 1969.