Development of piezoelectric thin film resonator and its impact on future wireless communication systems

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 2883-2894

  Satoh, Yoshio ^a   Nishihara, Tokihiro ^a   Yokoyama, Tsuyoshi ^a   Ueda, Masanori ^a   Miyashita, Tsutomu ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Bulk acoustic wave (BAW); Film bulk acoustic resonator (FBAR); Mobile communication; Piezoelectric thin film resonator; Q factor; Solidly mounted resonator (SMR); Surface acoustic wave (SAW)

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ELECTRIC DISCHARGES; LOCAL AREA NETWORKS; MOBILE TELECOMMUNICATION SYSTEMS; PHOTOLITHOGRAPHY; Q FACTOR MEASUREMENT; RESONATORS; SINGLE CRYSTALS; STANDARDS; THIN FILMS; WIRELESS TELECOMMUNICATION SYSTEMS;

BULK ACOUSTIC WAVE (BAW); FILM BULK ACOUSTIC RESONATOR (FBAR); MOBILE COMMUNICATION; PIEZOELECTRIC THIN FILMS; Q FACTOR; SOLIDLY MOUNTED RESONATOR (SMR); SURFACE ACOUSTIC WAVE (SAW);

PIEZOELECTRIC MATERIALS;

EID: 22544431941     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.2883     Document Type: Review

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