Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications

Sensors and Actuators, A: Physical

Volumn 159, Issue 1, 2010, Pages 111-116

  Sharma, Gunjana ^a   Liljeholm, Lina ^a   Enlund, Johannes ^a   Bjurström, Johan ^a   Katardjiev, Ilia ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Microfluidic system; PDMS; Polydimethylsiloxane; Surface mounted resonator (SMR)

Indexed keywords

ACTIVE AREA; ALN; ALN THIN FILMS; ANALYTES; FABRICATION PROCESS; HIGHLY SENSITIVE; LIQUID OPERATION; LIQUID SENSORS; MICRO-FLUIDIC SENSORS; MICROFLUIDIC SYSTEM; PDMS; POINT-OF-CARE TESTING; Q-VALUES; RESONANCE FREQUENCIES; SENSOR CHIPS; SENSOR OPERATIONS; SHEAR MODES; SOLIDLY MOUNTED RESONATOR;

ACETONE; DEPOSITION; FABRICATION; FLUIDIC DEVICES; GLYCEROL; LIQUIDS; MICROCHANNELS; MICROFLUIDICS; RESONANCE; RESONATORS; SENSORS; SMALL NUCLEAR REACTORS;

SILICONES;

EID: 77950338152     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.02.009     Document Type: Article

References (33)

1. Kwakye S., and Baeummer A. A microfluidic biosensor based on nucleic acid sequence recognition. Anal. Bioanal. Chem. 376 (2003) 1062-1068
2. Duffy D., McDonald J., Schueller O., and Whitesides G.M. Anal. Chem. 70 (1998) 4974-4984
3. Jingdong X., Locascio L., Gaitan M., and Lee C. Anal. Chem. 72 (2000) 1930-1933
4. Martynova L., Locascio L., Gaitan M., Kramer G., Christensen R., and MacCrehan W. Anal. Chem. 69 (1997) 4783-4789
5. Tuantranont A., Lomas T., Maturos T., Wisitsora-at A., Thavarungkul P., Kanatharana P., Limbut W., and Loyprasert S. Development of low-cost microfluidic systems for lab-on-a-chip biosensor applications. Nanobiotechnology 2 (2006) 143-149
6. Brederlow R., Zauner S., Scholtz A.L., Aufinger K., Simburger W., Paulus C., Martin A., Fritz M., Timme H.J., Heiss H., Marksteiner S., Elbrecht L., Aigner R., and Thewes R. Biochemical sensors based on bulk acoustic wave Resonators Electron Devices Meeting IEDM'03 Tech. Digest IEEE. Washington, DC, United States (2003) 32.7.1-32.7.3 10.1109/IEDM.2003.1269447
7. Wingqvist G., Bjurström J., Liljeholm L., Katardjiev I., and Spetz A.L. Shear mode AlN thin film electroacoustic resonator for biosensor applications. Sensors, Irvine (2005) 10.1109/ICSENS.2005.1597743
8. Bjurström J., Wingqvist G., and Katardjiev I. Synthesis of textured thin piezoelectric AlN films with a nonzero c-axis mean tilt. Ultrasonics Symposium, IEEE, vol. 1. Rotterdam (2005) 321-324
9. Wingqvist G., Bjurstrom J., Liljeholm L., Yantchev V., and Katardjiev I. Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media. Sens. Actuators B (2006) 10.1016/j.snb.2006.09.028
10. Lakin K.M., Wang J.S., Kline G.R., Landin A.R., Chen Y.Y., and Hunt J.D. Proceedings IEEE Ultrasonic Symposium, vol. 1. San Diego, CA. Thin film resonators and filters (1982) 466
11. Larson J.D., Ruby R.C., Bradley P.D., Wen J., Kok S.-L., and Chien A. Power handling, temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band. IEEE Ultrasonics Symposium. San Juan (2000) 869-874
12. Ruby R.C., and Merchant P.P. Proceedings of the IEEE 48th Symposium on Frequency Control. Boston, MA, USA. Micromachined thin film bulk acoustic resonators (1994) 135-138
13. Loebl H.P., Metzmacher C., Milsom R.F., Lok P., Van Straten F., and Tuinhout A. RF bulk acoustic wave resonators and filters. J. Electroceram. 12 (2004) 109-118
14. Norling M., Enlund J., Gevorgian S., and Katardjiev I. A 2 GHz oscillator based on a solidly mounted thin film bulk acoustic wave resonator. IEEE MTT-S International. San Francisco, CA (2006) 1813-1816 10.1109/MWSYM.2006.249747
15. Zaytseva N.V., Goral V.N., Montagna R.A., and Baeumner A.J. Development of a microfluidic biosensor module for pathogen detection. Lab Chip 5 (2005) 805-811
16. Ryu K.S., Wang X., Shaikh K., and Liu C. A method for precision patterning of silicon elastomer and its applications. J. Microelectromech. Syst. 13 (2004) 4
17. Engelmark F., Iriarte G.F., and Katardjiev I.V. Selective etching of Al/AlN structures for metallization of surface acoustic wave devices. J. Vac. Sci. Tech. B: Microelectron. Nanometer Struct. 20 (2002) 843-848
18. J. Larson, R. Ruby, P. Bradley, Method for reducing lateral modes in FBARs, U.S. Pat. 6,215,375 (2001).
19. Thorslund S., Larsson R., Nikolajeff F., Bergquist J., and Sanchez J. Bioactivated PDMS microchannel evaluated as sensor for human CD4+ cells-the concept of a point-of-care method for HIV monitoring. Sens. Actuators B 123 (2007) 847-855
20. Ng J.M.K., Gitlin I., Stroock A.D., and Whitesides G.M. Components for integrated poly(dimethylsiloxane) microfluidic systems. Rev. Electrophoresis 23 (2002) 3461-3473
21. McDonald J.C., Duffy D.C., Anderson J.R., Chiu D.T., Wu H., Schueller O.J.A., and Whitesides G.M. Electrophoresis 21 (2000) 27-40
22. Chaudhury M.K., and Whitesides G.M. Langmuir 7 (1991) 1013-1025
23. Morra M., Occhiello E., Marola R., Garbassi F., Humphrey P., and Johnson D. J. Colloid Int. Sci. 137 (1990) 11-24
24. Tang K.C., Liao E., Ong W.L., Wong J.D.S., Agarwal A., Nagarajan R., and Yobas L. Evaluation of bonding between oxygen plasma treated polydimethylsiloxane and passivated silicon. J. Phys.: Conf. Ser. 34 (2006) 155-161
25. Jo B.H., Van Lerberghe L.M., Motsegood K.M., and Beebe D.J. Microchannel fabrication in PDMS elastomer. J. Micromech. Syst. 9 1 (2000) 76-81
26. Lakin K.M., Kline G.R., and McCarron K.T. High-Q microwave acoustic resonators and filters. Microwave Theor. Tech. IEEE Trans. 41 (1993) 2139-2146
27. Bjurström J., Wingqvist G., Yantchev V., and Katardjiev I. Temperature compensation of liquid FBAR sensors. J. Micromech. Microeng. 17 (2007) 651-658
28. H. Anderson, Development of Electroacoustic Sensors for Biomolecular Interaction Analysis. Ph.D. Thesis, Uppsala University (2009).
29. Mason W.P. Electromechanical Transducers and Wave Filters (1948), Van Nostrand, Princeton, NJ
30. 3 and AlN/Si. IEEE Ultrason. Sympos. Proc. (1981) 375-380
31. Kanazawa K.K., and Gordon J.G. Frequency of a quartz microbalance in contact with liquid. Anal. Chem. 57 (1985) 1770-1771
32. Wingqvist G., Yantchev V., Bjurström J., and Katardjiev I. IEEE International Frequency Control Symposium Jointly with the 21st European Frequency and Time Forum (2007) 581-586
33. Wingqvist G., Bjurström J., Liljeholm L., Yantchev V., and Katardjiev I. Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media. Sens. Actuators B 123 (2007) 466-473