Retarding field analyzer for ion energy distribution measurement through a radio-frequency or pulsed biased sheath

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Gahan, David ^a   Dolinaj, Borislav ^a   Hayden, Chanel ^a   Hopkins, Michael B ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

Electron energy distribution; Ion energy distribution; Retarding field energy analyzer; Rf plasma

Indexed keywords

DRIVING SIGNAL; ELECTRODE POTENTIALS; ELECTRODE SURFACES; ELECTRON ENERGY DISTRIBUTIONS; ENERGY REGIONS; FIELD ENERGY; HIGH ENERGY TAILS; INDUCTIVELY COUPLED PLASMA REACTOR; ION ENERGY DISTRIBUTIONS; PLASMA DISCHARGE; PULSED BIAS; RADIO FREQUENCIES; RADIO-FREQUENCY POWER; RF PLASMA; WIDE-BAND;

DISSOCIATION; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY LEVELS; ELECTRONS; INDUCTIVELY COUPLED PLASMA; ION BEAMS; IONS; LOW PASS FILTERS; PLASMA APPLICATIONS; PLASMA SOURCES; PLASMA THEORY; WAVE PLASMA INTERACTIONS;

ELECTRIC DISCHARGES;

EID: 77954931467     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931607     Document Type: Conference Paper

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