Differences between chloro-carbon and hydro-carbon precursors in low-temperature epitaxial growth of 4H-SiC

Physica Status Solidi - Rapid Research Letters

Volumn 4, Issue 7, 2010, Pages 145-147

  Kotamraju, Siva ^a   Krishnan, Bharat ^a   Koshka, Yaroslav ^a  

^a MISSISSIPPI STATE UNIVERSITY   (United States)

Author keywords

CVD; Epitaxy; Semiconductors; Structure and morphology; Thin films

Indexed keywords

C/SI RATIO; CARBON PRECURSORS; CHLOROMETHANE; CVD; EPILAYER QUALITY; HIGH GROWTH RATE; LOW TEMPERATURE EPITAXIAL GROWTH; LOW TEMPERATURES; LOWER BOUNDARY; POLYCRYSTALLINE; POLYTYPES; PROCESS WINDOW; STRUCTURE AND MORPHOLOGY; UPPER BOUNDARY;

DEGRADATION; EPITAXIAL GROWTH; HYDROCARBONS; MORPHOLOGY; PROPANE; SEMICONDUCTOR GROWTH; SILICON CARBIDE; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77954772751     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.201004110     Document Type: Article

References (16)

1. H. S. Kong, J. T. Glass, and R. F. Davis, J. Appl. Phys. 64, 2672 (1988).
2. T. Kimoto, H. Nishino, W. S. Yoo, and H. Matsunami, J. Appl. Phys. 73, 726 (1993).
3. R. Myers, O. Kordina, Z. Shishkin, S. Rao, R. Everly, and S. E. Saddow, Mater. Sci. Forum 483-485, 73-76 (2005).
4. F. La Via, G. Izzo, M. Mauceri, G. Pistone, G. Condorelli, L. Perdicaro, G. Abbondanza, L. Calcagno, G. Foti, and D. Crippa, J. Cryst. Growth 311, 107 (2008).
5. G. Dhanaraj, M. Dudley, Y. Chen, B. Ragothamachar, B. Wu, and H. Zhang, J. Cryst. Growth 287, 344 (2006).
6. H. Pedersen, S. Leone, A. Henry, F. C. Beyer, V. Darak-chieva, and E. Janzén, J. Cryst. Growth 307, 334 (2007).
7. H. Pedersen, S. Leone, A. Henry, A. Lundskog, and E. Jan-zén, Phys. Status Solidi RRL 2(6), 278 (2008).
8. S. Kotamraju, B. Krishnan, and Y. Koshka, Phys. Status So-lidi RRL 3(5), 157 (2009).
9. Z. Y. Xie, S. F. Chen, J. H. Edgar, K. Barghout, and J. Chaudhuri, Electrochem. Solid-State Lett. 3(8), 381-384 (2000).
10. S. Leone, H. Pedersen, A. Henry, O. Kordina, and E. Jan-zén, J. Cryst. Growth 312, 24-32 (2009).
11. Y. Koshka, H. D. Lin, G. Melnychuk, and C. Wood, J. Cryst. Growth 294, 260-267 (2006).
12. G. Melnychuk, H. D. Lin, Siva Kotamraju, and Y. Koshka, J. Appl. Phys. 104, 053517 (2008).
13. S. Kotamraju, B. Krishnan, G. Melnychuk, and Y. Koshka, J. Cryst. Growth 312(5), 645-650 (2010).
14. H. Das, G. Melnychuk, and Y. Koshka, Mater. Sci. Forum 615-617, 121-124 (2009).
15. G. S. Fischman and W. T. Petuskey, J. Am. Ceram. Soc. 68(4), 185-190 (1985).
16. Yo-Ping Wu and Yang-Soo Won, Combust. Flame 122(3), 312-326 (2000).