SCOPUS 정보 검색 플랫폼

Physica Status Solidi - Rapid Research Letters

Volumn 3, Issue 5, 2009, Pages 157-159

Use of chlorinated carbon and silicon precursors for epitaxial growth of 4H-SiC at very high growth rates

(3) Kotamraju, Siva a Krishnan, Bharat a Koshka, Yaroslav a

a MISSISSIPPI STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON PRECURSORS; DROPLET FORMATION; GASPHASE; HIGH GROWTH RATE; HIGH QUALITY; HOMOGENEOUS NUCLEATION; LOW TEMPERATURE EPITAXIAL GROWTH; LOW TEMPERATURES; LOW-TEMPERATURE PHOTOLUMINESCENCE SPECTROSCOPY; MORPHOLOGY DEGRADATION; PRECURSOR FLOW RATES; SILICON PRECURSORS; SILICON TETRACHLORIDE; TEMPERATURE INCREASE; TIME-RESOLVED LUMINESCENCE;

DROP FORMATION; EPILAYERS; NUCLEATION; PHOTOLUMINESCENCE SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE;

EPITAXIAL GROWTH;

EID: 71149094833 PISSN: 18626254 EISSN: 18626270 Source Type: Journal
DOI: 10.1002/pssr.200903149 Document Type: Article

Times cited : (14)

References (10)

1
- 33750292689
- F. La Via, G. Galvagno, G. Foti, M. Mauceri, S. Leone, G. Pistone, G. Abbondanza, A. Veneroni, M. Masi, G. L. Valente, and D. Crippa, Chem. Vapor Depos. 12, 509 (2006).
- (2006) Chem. Vapor Depos. , vol.12 , pp. 509
- La Via, F.¹ Galvagno, G.² Foti, G.³ Mauceri, M.⁴ Leone, S.⁵ Pistone, G.⁶ Abbondanza, G.⁷ Veneroni, A.⁸ Masi, M.⁹ Valente, G.L.¹⁰ Crippa, D.¹¹

2
- 33747111200
- R. Myers, O. Kordina, Z. Shishkin, S. Rao, R. Everly, and S. E. Saddow, Mater. Sci. Forum 483-485, 73-76 (2005).
- (2005) Mater. Sci. Forum , vol.483-485 , pp. 73-76
- Myers, R.¹ Kordina, O.² Shishkin, Z.³ Rao, S.⁴ Everly, R.⁵ Saddow, S.E.⁶

3
- 30444460586
- G. Dhanaraj, M. Dudley, Y. Chen, B. Ragothamachar, B. Wu, and H. Zhang, J. Cryst. Growth 287, 344 (2006).
- (2006) J. Cryst. Growth , vol.287 , pp. 344
- Dhanaraj, G.¹ Dudley, M.² Chen, Y.³ Ragothamachar, B.⁴ Wu, B.⁵ Zhang, H.⁶

4
- 57749185026
- F. La Via, G. Izzo, M. Mauceri, G. Pistone, G. Condorelli, L. Perdicaro, G. Abbondanza, L. Calcagno, G. Foti, and D. Crippa, J. Cryst. Growth 311, 107 (2008).
- (2008) J. Cryst. Growth , vol.311 , pp. 107
- La Via, F.¹ Izzo, G.² Mauceri, M.³ Pistone, G.⁴ Condorelli, G.⁵ Perdicaro, L.⁶ Abbondanza, G.⁷ Calcagno, L.⁸ Foti, G.⁹ Crippa, D.¹⁰

5
- 63849267245
- S. Leone, H. Pedersen, A. Henry, O. Kordina, and E. Janzén, Mater. Sci. Forum 600-603, 107-110 (2009).
- (2009) Mater. Sci. Forum , vol.600-603 , pp. 107-110
- Leone, S.¹ Pedersen, H.² Henry, A.³ Kordina, O.⁴ Janzén, E.⁵

6
- 34548418579
- H. Pedersen, S. Leone, A. Henry, F. C. Beyer, V. Darakchieva, and E. Janzén, J. Cryst. Growth 307, 334 (2007).
- (2007) J. Cryst. Growth , vol.307 , pp. 334
- Pedersen, H.¹ Leone, S.² Henry, A.³ Beyer, F.C.⁴ Darakchieva, V.⁵ Janzén, E.⁶

7
- 61449206509
- H. Pedersen, S. Leone, A. Henry, A. Lundskog, and E. Janzén, Phys. Status Solidi RRL 2(6), 278 (2008).
- (2008) Phys. Status Solidi RRL , vol.2 , Issue.6 , pp. 278
- Pedersen, H.¹ Leone, S.² Henry, A.³ Lundskog, A.⁴ Janzén, E.⁵

8
- 33846108552
- Y. Koshka, H. D. Lin, G. Melnychuk, and C. Wood, J. Cryst. Growth 294, 260-267 (2006).
- (2006) J. Cryst. Growth , vol.294 , pp. 260-267
- Koshka, Y.¹ Lin, H.D.² Melnychuk, G.³ Wood, C.⁴

9
- 51849148347
- G. Melnychuk, H. D. Lin, S. P. Kotamraju, and Y. Koshka, J. Appl. Phys. 104, 053517 (2008).
- (2008) J. Appl. Phys. , vol.104 , pp. 053517
- Melnychuk, G.¹ Lin, H.D.² Kotamraju, S.P.³ Koshka, Y.⁴

10
- 71149121436
- submitted
- S. Kotamraju, B. Krishnan, G. Melnychuk, and Y. Koshka, J. Cryst. Growth, submitted.
- J. Cryst. Growth
- Kotamraju, S.¹ Krishnan, B.² Melnychuk, G.³ Koshka, Y.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.