Super permeable nano-channel membranes defined with laser interferometric lithography

Microfluidics and Nanofluidics

Volumn 8, Issue 4, 2010, Pages 557-563

  Elman, Noel M ^a,b   Daniel, Karen ^b   Jalali Yazdi, Farzad ^b   Cima, Michael J ^a,b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTIVE MASS; HIGH PERMEABILITY; HIGH POROSITY; LARGE ARRAYS; LARGE SURFACE AREA; LASER INTERFEROMETRIC LITHOGRAPHIES; NANO CHANNELS; NANO SCALE; SUSPENDED MEMBRANES;

AMORPHOUS SILICON; LASER INTERFEROMETRY; MECHANICAL STABILITY; MEMBRANES; NANOTECHNOLOGY; SURFACE TESTING;

MECHANICAL PERMEABILITY;

EID: 77954761612     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-009-0537-z     Document Type: Article

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