Nanosieves with microsystem technology for microfiltration applications

Nanotechnology

Volumn 9, Issue 4, 1998, Pages 343-345

  Van Rijn, Cees J M ^a   Veldhuis, Gert J ^a   Kuiper, Stein ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROMACHINING; NANOFILTRATION; NANOSTRUCTURED MATERIALS; SILICON;

NANOSIEVES;

MICROFILTRATION;

EID: 0032319282     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/9/4/007     Document Type: Article

References (11)

1. Scott K 1995 Handbook of Industrial Membranes (Amsterdam: Elsevier) p 112, p 120
2. Strathmann H 1992 Separation and Purification Technology ed N N Li and J M Calo (New York: Dekker) pp 1-17
3. Mulder M 1996 Basic Principles of Membrane Technology (Dordrecht: Kluwer) p 228
4. van Rijn C J M and Elwenspoek M 1995 IEEE Proc. MEMS p 83
5. Boltzer C O, Harris C T, Rabe S, Rathman D, Hollis M A and Smith H I 1994 J. Vac. Sci. Technol. B 12 629
6. Mai X, Moshrefzadeh R, Gibson U J, Stegeman G I and Seaton C T 1985 Appl. Opt. 24 3155
7. Saleem H Z and Brueck S R J 1993 J. Vac. Sci. Technol. B 11 658
8. Spallas J P, Hawryluk A M and Kania D R 1995 J. Vac. Sci. Technol. B 13 1973
9. Fernandez A, Bedrossian P J, Baker S L, Vernon S P and Kania D R 1996 IEEE Trans. Mag. 32 4472
10. van Rijn C J M, van der Wekken M, Nijdam W and Elwenspoek M 1997 J. MEMS 6 48-54
11. 1993 Anopore, alumina membrane filter Whatmann Product Guide