Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators

Microsystem Technologies

Volumn 14, Issue 2, 2008, Pages 287-293

  Elman, Noel M ^a,b   Krylov, Slava ^a   Sternheim, Marek ^a   Shacham Diamand, Yosi ^a  

^a TEL AVIV UNIVERSITY   (Israel)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; INTEGRATION; MICROSTRUCTURE; MODULATORS; NATURAL FREQUENCIES; SINGLE CRYSTALS;

COMB-DRIVE ACTUATORS; FOLDED SUSPENSIONS; MICRO-OPTO-ELECTRO-MECHANICAL- SYSTEMS (MOEMS); MULTIPLE ASPECT RATIO STRUCTURAL INTEGRATION IN SINGLE-CRYSTAL-SILICON (MASIS);

SILICON;

EID: 35148887055     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0422-1     Document Type: Article

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