-
7
-
-
24944452594
-
Monolithic-integrated 8CH MEMS variable optical attenuators
-
Lee C (2005) Monolithic-integrated 8CH MEMS variable optical attenuators. Sensors Actuators A 123:596-601
-
(2005)
Sensors Actuators A
, vol.123
, pp. 596-601
-
-
Lee, C.1
-
8
-
-
35148880907
-
Multiple depth, single crystal silicon microactuators for large displacement fabricated by deep reactive ion etching
-
Lee C-S, Han S, MacDonald NC (1998) Multiple depth, single crystal silicon microactuators for large displacement fabricated by deep reactive ion etching. IEEE Conf Hilton Head 322-329
-
(1998)
IEEE Conf Hilton Head
, pp. 322-329
-
-
Lee, C.-S.1
Han, S.2
MacDonald, N.C.3
-
9
-
-
0036732313
-
Bonding of silicon scanning mirror having vertical comb fingers
-
Lee J-H, Ko Y-C, Choi B-S, Kim J-M, Jeon DY (2002a) Bonding of silicon scanning mirror having vertical comb fingers. J Micromech Microeng 12:644-649
-
(2002)
J Micromech Microeng
, vol.12
, pp. 644-649
-
-
Lee, J.-H.1
Ko, Y.-C.2
Choi, B.-S.3
Kim, J.-M.4
Jeon, D.Y.5
-
10
-
-
0036897253
-
SOI-based fabrication processes of the scanning mirror having vertical comb fingers
-
Lee J-H, Ko Y-C, Jeong H-M, Choi B-S, Kim J-M, Duk YJ (2002b) SOI-based fabrication processes of the scanning mirror having vertical comb fingers. Sensors Actuators A 102:11-18
-
(2002)
Sensors Actuators A
, vol.102
, pp. 11-18
-
-
Lee, J.-H.1
Ko, Y.-C.2
Jeong, H.-M.3
Choi, B.-S.4
Kim, J.-M.5
Duk, Y.J.6
-
11
-
-
0032762248
-
Micro-Opto-Mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
-
1
-
Marxer C, de Rooij NF (1999) Micro-Opto-Mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation. J Lightwave Technol 17(1):2-6
-
(1999)
J Lightwave Technol
, vol.17
, pp. 2-6
-
-
Marxer, C.1
De Rooij, N.F.2
-
12
-
-
0037320894
-
Laterally actuated torsional micromirrors for large static deflection
-
2
-
Milanović V, Last M, Pister K (2003) Laterally actuated torsional micromirrors for large static deflection. IEEE Photonics Technol Lett 15(2):245-247
-
(2003)
IEEE Photonics Technol Lett
, vol.15
, pp. 245-247
-
-
Milanović, V.1
Last, M.2
Pister, K.3
-
13
-
-
0032137442
-
Micromachined devices for wireless communications
-
8
-
Nguyen CT, Katehi L, Rebeiz G (1998) Micromachined devices for wireless communications. Proc IEEE 86(8):1756-1768
-
(1998)
Proc IEEE
, vol.86
, pp. 1756-1768
-
-
Nguyen, C.T.1
Katehi, L.2
Rebeiz, G.3
-
14
-
-
0030364402
-
Stiction in surface micromachining
-
Tas N, Sonnenberg T, Jansen H, Legtenberg R, Elwenspoek M (1996) Stiction in surface micromachining. J Micromech Microeng 6:385-397
-
(1996)
J Micromech Microeng
, vol.6
, pp. 385-397
-
-
Tas, N.1
Sonnenberg, T.2
Jansen, H.3
Legtenberg, R.4
Elwenspoek, M.5
-
16
-
-
3042699997
-
Characterizations and analysis of a DRIE CMOS-MEMS Gyroscope
-
5
-
Xie H, Fedder G (2003) Characterizations and analysis of a DRIE CMOS-MEMS Gyroscope. IEEE Sensors J 3(5):622-631
-
(2003)
IEEE Sensors J
, vol.3
, pp. 622-631
-
-
Xie, H.1
Fedder, G.2
-
17
-
-
0037340959
-
Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators
-
Zhou G, Dowd P (2003) Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators. J Micromech Microeng 13:49-56
-
(2003)
J Micromech Microeng
, vol.13
, pp. 49-56
-
-
Zhou, G.1
Dowd, P.2
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