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Volumn 14, Issue 2, 2008, Pages 287-293

Multiple aspect-ratio structural integration in single crystal silicon (MASIS) for fabrication of transmissive MOEMS modulators

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; INTEGRATION; MICROSTRUCTURE; MODULATORS; NATURAL FREQUENCIES; SINGLE CRYSTALS;

EID: 35148887055     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0422-1     Document Type: Article
Times cited : (7)

References (17)
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    • Integrated Heterodyne MOEMS for detection of low intensity signals
    • Elman NM, Krylov S, Sternheim M, Shacham-Diamand Y (2006) Integrated Heterodyne MOEMS for detection of low intensity signals. Proc SPIE 6114:86-96
    • (2006) Proc SPIE , vol.6114 , pp. 86-96
    • Elman, N.M.1    Krylov, S.2    Sternheim, M.3    Shacham-Diamand, Y.4
  • 4
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    • 24944452594 scopus 로고    scopus 로고
    • Monolithic-integrated 8CH MEMS variable optical attenuators
    • Lee C (2005) Monolithic-integrated 8CH MEMS variable optical attenuators. Sensors Actuators A 123:596-601
    • (2005) Sensors Actuators A , vol.123 , pp. 596-601
    • Lee, C.1
  • 8
    • 35148880907 scopus 로고    scopus 로고
    • Multiple depth, single crystal silicon microactuators for large displacement fabricated by deep reactive ion etching
    • Lee C-S, Han S, MacDonald NC (1998) Multiple depth, single crystal silicon microactuators for large displacement fabricated by deep reactive ion etching. IEEE Conf Hilton Head 322-329
    • (1998) IEEE Conf Hilton Head , pp. 322-329
    • Lee, C.-S.1    Han, S.2    MacDonald, N.C.3
  • 11
    • 0032762248 scopus 로고    scopus 로고
    • Micro-Opto-Mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
    • 1
    • Marxer C, de Rooij NF (1999) Micro-Opto-Mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation. J Lightwave Technol 17(1):2-6
    • (1999) J Lightwave Technol , vol.17 , pp. 2-6
    • Marxer, C.1    De Rooij, N.F.2
  • 12
    • 0037320894 scopus 로고    scopus 로고
    • Laterally actuated torsional micromirrors for large static deflection
    • 2
    • Milanović V, Last M, Pister K (2003) Laterally actuated torsional micromirrors for large static deflection. IEEE Photonics Technol Lett 15(2):245-247
    • (2003) IEEE Photonics Technol Lett , vol.15 , pp. 245-247
    • Milanović, V.1    Last, M.2    Pister, K.3
  • 13
    • 0032137442 scopus 로고    scopus 로고
    • Micromachined devices for wireless communications
    • 8
    • Nguyen CT, Katehi L, Rebeiz G (1998) Micromachined devices for wireless communications. Proc IEEE 86(8):1756-1768
    • (1998) Proc IEEE , vol.86 , pp. 1756-1768
    • Nguyen, C.T.1    Katehi, L.2    Rebeiz, G.3
  • 16
    • 3042699997 scopus 로고    scopus 로고
    • Characterizations and analysis of a DRIE CMOS-MEMS Gyroscope
    • 5
    • Xie H, Fedder G (2003) Characterizations and analysis of a DRIE CMOS-MEMS Gyroscope. IEEE Sensors J 3(5):622-631
    • (2003) IEEE Sensors J , vol.3 , pp. 622-631
    • Xie, H.1    Fedder, G.2
  • 17
    • 0037340959 scopus 로고    scopus 로고
    • Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators
    • Zhou G, Dowd P (2003) Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators. J Micromech Microeng 13:49-56
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.