Micromachined membrane particle filters

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 184-191

  Yang, Xing ^a,b   Yang, Joon Mo ^c   Tai, Yu Chong ^a   Ho, Chih Ming ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b ACLARA BioSciences Inc   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FILTERS (FOR FLUIDS); FLUID DYNAMICS; MEMBRANES; NAVIER STOKES EQUATIONS; PRESSURE DROP; SILICON NITRIDE;

PARTICLE MEMBRANE FILTERS;

MICROMACHINING;

EID: 0033537529     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00269-6     Document Type: Article

References (8)

1. C.N. Davies, Aerosol Science, Academic Press, 1966, p. 409.
2. C.J.M. van Rijin, M.C. Elwenpoek, Micro Filtration Membrane Sieve with Silicon Micro Machining for Industrial and Biomedical Applications, Proceedings of IEEE the Eighth Workshop on Micro Electro Mechanical Systems, January 1995, pp. 83-87.
3. van Rijin C.J.M., van der Wekken M., Nijdam W., Elwenspoek M.C. Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining. Journal of Microelectromechanical Systems. 6(1):1997;48-54.
4. Kittilsland G., Stemme G., Norden B. A submicron paticle filter in silicon. Sensors and Actuators A: Physical. 23:1990;904-907.
5. Sekimoto M., Yoshihara H., Ohkubo T. Silicon nitride single-layer X-ray mask. J. Vac. Sci. Technol. 21(4):1982;1017-1021.
6. G.B. Schubauer, W.G. Spangenberg, P.S. Klebanoff, Aerodynamic Characteristics of Damping Screens, N.A.C.A., Technical Notes 2001, 1950.
7. Wieghardt K.E.G. On the resistance of screens. The Aeronautical Quarterly. IV:1953;186-192.
8. Hasegawa T., Suganuma M., Watanabe H. Anomaly of excess pressure drops of the flow through very small orifices. Physics of Fluids. 9(1):1997;1-3.