Fine-structured patterns of porous alumina material fabricated by a replication method

Journal of the European Ceramic Society

Volumn 30, Issue 13, 2010, Pages 2735-2739

  Kim, Hong Dae ^a   Nakayama, Tadachika ^a   Hong, Byung Jin ^a   Imaki, Kazuyoshi ^a   Yoshimura, Takeshi ^b   Suzuki, Tsuneo ^a   Suematsu, Hisayuki ^a   Niihara, Koichi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b Osaka City University   (Japan)

Author keywords

Alumina; Ceramics patterning; Polyvinyl alcohol; Replication; Shrinkage

Indexed keywords

ALUMINA CERAMIC; CERAMICS PATTERNING; DRIED FILMS; LENGTH SCALE; LINE-AND-SPACE PATTERNS; NANO-SIZED PARTICLES; PATTERN SIZE; POROUS ALUMINA; POROUS INORGANIC MATERIALS; REPLICATION METHOD; ROOM TEMPERATURE; SILICON MOLDS; SIMPLE METHOD; SINTERING TEMPERATURES; STRUCTURED PATTERNS; SUBMICROMETERS;

CERAMIC MATERIALS; FABRICATION; MOLDS; POROUS MATERIALS; SHRINKAGE; SINTERING;

SINTERED ALUMINA;

EID: 77954535550     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2010.05.001     Document Type: Article

References (22)

1. Göbel O.F., Nedelcu M., Steiner U. Soft lithography of ceramic patterns. Adv Funct Mater 2007, 17:1131-1136.
2. Martin C.R., Aksay I.A. Submicrometer-scale patterning of ceramic thin films. J Electroceram 2004, 12:53-68.
3. Alexe M., Harnagea C., Hesse D. Non-conventional micro- and nanopatterning techniques for electroceramics. J Electroceram 2004, 12:69-88.
4. Yang P., Deng T., Zhao D., Feng P., Pine D., Chemelka B.F., et al. Hierarchically ordered oxides. Science 1998, 282:2244-2247.
5. Trau M., Yao N., Kim E., Xia Y., Whitesides G.M., Aksay I.A. Microscopic patterning of orientated mesoscopic silica through guided growth. Nature 1997, 390:674-676.
6. Yang H., Deschatelets P., Brittain S.T., Whitesides G.M. Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography. Adv Mater 2001, 13(1):54-58.
7. Seraji S., Wu Y., Jewell-Larson E., Forbess M.J., Limmer S.J., Chou T.P., et al. Patterned microstructure of sol-gel derived complex oxides using soft lithography. Adv Mater 2000, 12(19):1421-1424.
8. Yang H., Coombs N., Ozin G.A. Mesoporous silica with micrometer-scale designs. Adv Mater 1997, 9(10):811-814.
9. Moran P.M., Lange F.F. Microscale lithography via channel stamping: relationships between capillarity, channel filling, and debonding. Appl Phys Lett 1999, 74(9):1332-1334.
10. Schönholzer U.P., Hummel R., Gauckler L.J. Microfabrication of ceramics by filling of photoresist molds. Adv Mater 2000, 12(17):1261-1263.
11. Donthu S., Pan Z., Myers B., Shekhawat G., Wu N., Dravid V. Facile scheme for fabricating solid-state nanostructures using e-beam lithography and solution precursors. Nano Lett 2005, 5(9):1710-1715.
12. Clemens S., Schnell T., Hart A., Peter F., Waser R. Registered deposition of nanoscale ferroelectric grains by template-controlled growth. Adv Mater 2005, 17:1357-1361.
13. Chou S.Y., Krauss P.R., Renstrom P.J. Imprint of sub-25nm vias and trenches in polymers. Appl Phys Lett 1995, 67(21):3114-3116.
14. Haisma J., Verheijen M., Heuvel K., Berg J. Mold-assisted nanolithography: a process for reliable pattern replication. J Vac Sci Technol B 1996, 14(6):4124-4128.
15. Guo L.J. Nanoimprint lithography: methods and material requirements. Adv Mater 2007, 19:495-513.
16. Hampton M.J., Williams S.S., Zhou Z., Nunes J., Ko D.-H., Templeton J.L., et al. The patterning of sub-500nm inorganic oxide structures. Adv Mater 2008, 20:2667-2673.
17. Zhang X., Honkanen M., Levänen E., Mäntylä T. Transition alumina nanoparticles and nanorods from boehmite nanoflakes. J Cryst Growth 2008, 310:3674-3679.
18. Schaper C.D. Patterned transfer of metallic thin film nanostructures by water-soluble polymer templates. Nano Lett 2003, 3(9):1305-1309.
19. Chabert F., Dunstan D.E., Franks G.V. Cross-linked polyvinyl alcohol as a binder for gelcasting and green machining. J Am Ceram Soc 2008, 91(10):3138-3146.
20. Dynys F.W., Halloran J.W. Alpha alumina formation in alum-derived gamma alumina. J Am Ceram Soc 1982, 65(9):442-448.
21. Wilson S.J., Stacey M.H. The porosity of aluminum oxide phases derived from well-crystallized boehmite: correlated electron microscope adsorption, and porosimetry studies. J Colloid Sci Interface Sci 1981, 82(2):507-517.
22. Brinker C.J., Scherer G.W. Sol-gel sciences. The physics and chemistry of sol-gel processing 1990, Academic Press, San Diego.