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Volumn 107, Issue 12, 2010, Pages

Oxidation and the origin of the two-dimensional electron gas in AlGaN/GaN heterostructures

Author keywords

[No Author keywords available]

Indexed keywords

ALGAN; ALGAN/GAN; ALGAN/GAN HETEROSTRUCTURES; ALGAN/GAN HIGH ELECTRON MOBILITY TRANSISTORS; ALN; BARRIER LAYERS; DRIVING MECHANISM; ELECTRON COUNTING; ELECTRON DENSITIES; OXIDATION CONDITIONS; OXIDE COVERAGE; SURFACE BARRIER; TRANSISTOR CHARACTERISTICS;

EID: 77954196211     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3431391     Document Type: Article
Times cited : (100)

References (62)
  • 1
    • 0001473741 scopus 로고    scopus 로고
    • AlGaN/GaN HEMTs - An overview of device operation and applications
    • DOI 10.1109/JPROC.2002.1021567, PII S0018921902055822
    • U. K. Mishra, P. Parikh, and Y. F. Wu, Proc. IEEE IEEPAD 0018-9219 90, 1022 (2002). 10.1109/JPROC.2002.1021567 (Pubitemid 43779259)
    • (2002) Proceedings of the IEEE , vol.90 , Issue.6 , pp. 1022-1031
    • Mishra, U.K.1    Parikh, P.2    Wu, Y.-F.3
  • 7
    • 15744362517 scopus 로고    scopus 로고
    • Cat-CVD SiN-Passivated AlGaN-GaN HFETs with thin and high Al composition barrier layers
    • DOI 10.1109/LED.2004.842736
    • M. Higashiwaki, N. Hirose, and T. Matsui, IEEE Electron Device Lett. EDLEDZ 0741-3106 26, 139 (2005). 10.1109/LED.2004.842736 (Pubitemid 40406772)
    • (2005) IEEE Electron Device Letters , vol.26 , Issue.3 , pp. 139-141
    • Higashiwaki, M.1    Hirose, N.2    Matsui, T.3
  • 8
    • 13644278174 scopus 로고    scopus 로고
    • On the origin of the two-dimensional electron gas at the AlGaN/GaN heterostructure interface
    • DOI 10.1063/1.1850600, 042107
    • G. Koley and M. G. Spencer, Appl. Phys. Lett. APPLAB 0003-6951 86, 042107 (2005). 10.1063/1.1850600 (Pubitemid 40232181)
    • (2005) Applied Physics Letters , vol.86 , Issue.4 , pp. 0421071-0421073
    • Koley, G.1    Spencer, M.G.2
  • 13
    • 34247863807 scopus 로고    scopus 로고
    • Microscopic origins of surface states on nitride surfaces
    • DOI 10.1063/1.2722731
    • C. G. Van de Walle and D. Segev, J. Appl. Phys. JAPIAU 0021-8979 101, 081704 (2007). 10.1063/1.2722731 (Pubitemid 46691125)
    • (2007) Journal of Applied Physics , vol.101 , Issue.8 , pp. 081704
    • Van De Walle, C.G.1    Segev, D.2
  • 14
    • 33750316327 scopus 로고    scopus 로고
    • Origins of Fermi-level pinning on GaN and InN polar and nonpolar surfaces
    • DOI 10.1209/epl/i2006-10250-2
    • D. Segev and C. G. Van de Walle, Europhys. Lett. EULEEJ 0295-5075 76, 305 (2006). 10.1209/epl/i2006-10250-2 (Pubitemid 44620860)
    • (2006) Europhysics Letters , vol.76 , Issue.2 , pp. 305-311
    • Segev, D.1    Van De Walle, C.G.2
  • 15
    • 33846837514 scopus 로고    scopus 로고
    • Surface reconstructions on InN and GaN polar and nonpolar surfaces
    • DOI 10.1016/j.susc.2006.12.018, PII S003960280601274X
    • D. Segev and C. G. Van de Walle, Surf. Sci. SUSCAS 0039-6028 601, L15 (2007). 10.1016/j.susc.2006.12.018 (Pubitemid 46204766)
    • (2007) Surface Science , vol.601 , Issue.4
    • Segev, D.1    Van De Walle, C.G.2
  • 16
    • 72449205165 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.80.155319
    • M. S. Miao, A. Janotti, and C. G. Van de Walle, Phys. Rev. B PRBMDO 0163-1829 80, 155319 (2009). 10.1103/PhysRevB.80.155319
    • (2009) Phys. Rev. B , vol.80 , pp. 155319
    • Miao, M.S.1    Janotti, A.2    Van De Walle, C.G.3
  • 17
    • 35949013015 scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.40.10481
    • M. D. Pashley, Phys. Rev. B PRBMDO 0163-1829 40, 10481 (1989). 10.1103/PhysRevB.40.10481
    • (1989) Phys. Rev. B , vol.40 , pp. 10481
    • Pashley, M.D.1
  • 18
    • 0036920883 scopus 로고    scopus 로고
    • PSSBBD 0370-1972. 10.1002/1521-3951(200212)234:3<773::AID- PSSB773>3.0.CO;2-0
    • M. Kočan, A. Rizzi, H. Lüth, S. Keller, and U. K. Mishra, Phys. Status Solidi B PSSBBD 0370-1972 234, 773 (2002). 10.1002/1521- 3951(200212)234:3<773::AID-PSSB773>3.0.CO;2-0
    • (2002) Phys. Status Solidi B , vol.234 , pp. 773
    • Kočan, M.1    Rizzi, A.2    Lüth, H.3    Keller, S.4    Mishra, U.K.5
  • 19
    • 33750455786 scopus 로고    scopus 로고
    • Electronic states of oxidized GaN(0001) surfaces
    • DOI 10.1063/1.2370519
    • Y. Dong, R. M. Feenstra, and J. E. Northrup, Appl. Phys. Lett. APPLAB 0003-6951 89, 171920 (2006). 10.1063/1.2370519 (Pubitemid 44656658)
    • (2006) Applied Physics Letters , vol.89 , Issue.17 , pp. 171920
    • Dong, Y.1    Feenstra, R.M.2    Northrup, J.E.3
  • 20
    • 0013386482 scopus 로고    scopus 로고
    • EPJBFY 1434-6028. 10.1007/s100510050771
    • O. Janzen, C. Hahn, and W. Monch, Eur. Phys. J. B EPJBFY 1434-6028 9, 315 (1999). 10.1007/s100510050771
    • (1999) Eur. Phys. J. B , vol.9 , pp. 315
    • Janzen, O.1    Hahn, C.2    Monch, W.3
  • 21
    • 0000970991 scopus 로고    scopus 로고
    • JAPIAU 0021-8979. 10.1063/1.362924
    • V. M. Bermudez, J. Appl. Phys. JAPIAU 0021-8979 80, 1190 (1996). 10.1063/1.362924
    • (1996) J. Appl. Phys. , vol.80 , pp. 1190
    • Bermudez, V.M.1
  • 29
    • 38049040737 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.77.033302
    • H. Ye, G. Chen, Y. Zhu, and S. H. Wei, Phys. Rev. B PRBMDO 0163-1829 77, 033302 (2008). 10.1103/PhysRevB.77.033302
    • (2008) Phys. Rev. B , vol.77 , pp. 033302
    • Ye, H.1    Chen, G.2    Zhu, Y.3    Wei, S.H.4
  • 30
    • 25744460922 scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.50.17953
    • P. E. Blöchl, Phys. Rev. B PRBMDO 0163-1829 50, 17953 (1994). 10.1103/PhysRevB.50.17953
    • (1994) Phys. Rev. B , vol.50 , pp. 17953
    • Blöchl, P.E.1
  • 31
    • 12844286241 scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.47.558
    • G. Kresse and J. Hafner, Phys. Rev. B PRBMDO 0163-1829 47, 558 (1993). 10.1103/PhysRevB.47.558
    • (1993) Phys. Rev. B , vol.47 , pp. 558
    • Kresse, G.1    Hafner, J.2
  • 32
    • 2442537377 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.54.11169
    • G. Kresse and J. Furthmuller, Phys. Rev. B PRBMDO 0163-1829 54, 11169 (1996). 10.1103/PhysRevB.54.11169
    • (1996) Phys. Rev. B , vol.54 , pp. 11169
    • Kresse, G.1    Furthmuller, J.2
  • 33
    • 0011236321 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.59.1758
    • G. Kresse and D. Joubert, Phys. Rev. B PRBMDO 0163-1829 59, 1758 (1999). 10.1103/PhysRevB.59.1758
    • (1999) Phys. Rev. B , vol.59 , pp. 1758
    • Kresse, G.1    Joubert, D.2
  • 34
    • 4243943295 scopus 로고    scopus 로고
    • PRLTAO 0031-9007. 10.1103/PhysRevLett.77.3865
    • J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. PRLTAO 0031-9007 77, 3865 (1996). 10.1103/PhysRevLett.77.3865
    • (1996) Phys. Rev. Lett. , vol.77 , pp. 3865
    • Perdew, J.P.1    Burke, K.2    Ernzerhof, M.3
  • 36
    • 34547139312 scopus 로고    scopus 로고
    • Erratum: Hybrid functionals based on a screened Coulomb potential (Journal of Chemical Physics (2003) 118 (8207))
    • DOI 10.1063/1.2204597
    • J. Heyd, G. E. Scuseria, and M. Ernzerhof, J. Chem. Phys. JCPSA6 0021-9606 124, 219906 (2006). 10.1063/1.2204597 (Pubitemid 43877849)
    • (2006) Journal of Chemical Physics , vol.124 , Issue.21 , pp. 219906
    • Heyd, J.1    Scuseria, G.E.2    Ernzerhof, M.3
  • 40
    • 0017536236 scopus 로고
    • Crystal structure refinement of aln and gan
    • DOI 10.1016/0038-1098(77)90959-0
    • H. Schulz and K. H. Thiemann, Solid State Commun. SSCOA4 0038-1098 23, 815 (1977). 10.1016/0038-1098(77)90959-0 (Pubitemid 8579065)
    • (1977) Solid State Communications , vol.23 , Issue.11 , pp. 815-819
    • Schulz Heinz1    Thiemann, K.H.2
  • 44
    • 77954179360 scopus 로고
    • D'Ans-Lax Taschenbuch für Chemiker und Physiker, in edited by E. Lax and C. Synowietz (Springer, Berlin)
    • D'Ans-Lax Taschenbuch für Chemiker und Physiker, in edited by, E. Lax, and, C. Synowietz, (Springer, Berlin, 1967), Vol. I.
    • (1967) , vol.1
  • 45
  • 49
    • 0025400035 scopus 로고
    • JACTAW 0002-7820. 10.1111/j.1151-2916.1990.tb06541.x
    • R. H. French, J. Am. Ceram. Soc. JACTAW 0002-7820 73, 477 (1990). 10.1111/j.1151-2916.1990.tb06541.x
    • (1990) J. Am. Ceram. Soc. , vol.73 , pp. 477
    • French, R.H.1
  • 50
    • 0000861795 scopus 로고
    • APPLAB 0003-6951. 10.1063/1.102335
    • M. L. Bortz and R. H. French, Appl. Phys. Lett. APPLAB 0003-6951 55, 1955 (1989). 10.1063/1.102335
    • (1989) Appl. Phys. Lett. , vol.55 , pp. 1955
    • Bortz, M.L.1    French, R.H.2
  • 51
    • 0017631217 scopus 로고
    • JESOAN 0013-4651. 10.1149/1.2133172
    • D. Ghosh and D. A. R. Kay, J. Electrochem. Soc. JESOAN 0013-4651 124, 1836 (1977). 10.1149/1.2133172
    • (1977) J. Electrochem. Soc. , vol.124 , pp. 1836
    • Ghosh, D.1    Kay, D.A.R.2
  • 53
    • 36849096334 scopus 로고
    • JCPSA6 0021-9606. 10.1063/1.1840945
    • M. Marezio and J. P. Remeika, J. Chem. Phys. JCPSA6 0021-9606 46, 1862 (1967). 10.1063/1.1840945
    • (1967) J. Chem. Phys. , vol.46 , pp. 1862
    • Marezio, M.1    Remeika, J.P.2
  • 55
    • 2342534428 scopus 로고    scopus 로고
    • JACTAW 0002-7820. 10.1111/j.1551-2916.2004.00683.x
    • M. Zinkevich and F. Aldinger, J. Am. Ceram. Soc. JACTAW 0002-7820 87, 683 (2004). 10.1111/j.1551-2916.2004.00683.x
    • (2004) J. Am. Ceram. Soc. , vol.87 , pp. 683
    • Zinkevich, M.1    Aldinger, F.2
  • 57
    • 0000511361 scopus 로고    scopus 로고
    • PRBMDO 0163-1829. 10.1103/PhysRevB.57.R2033
    • C. G. Van de Walle, Phys. Rev. B PRBMDO 0163-1829 57, R2033 (1998). 10.1103/PhysRevB.57.R2033
    • (1998) Phys. Rev. B , vol.57 , pp. 2033
    • Van De Walle, C.G.1
  • 59
    • 0003464216 scopus 로고    scopus 로고
    • NIST Standard Reference Database No. 69, edited by P. J. Linstrom and W. G. Mallard, (National Institute of Standards and Technology, Gaithersburg MD)
    • NIST Chemistry WebBook, NIST Standard Reference Database No. 69, edited by, P. J. Linstrom, and, W. G. Mallard, (National Institute of Standards and Technology, Gaithersburg MD, 2009); http://webbook.nist.gov
    • (2009) NIST Chemistry WebBook
  • 61
    • 0141990606 scopus 로고    scopus 로고
    • JAPIAU 0021-8979. 10.1063/1.1600519
    • I. Vurgaftman and J. R. Meyer, J. Appl. Phys. JAPIAU 0021-8979 94, 3675 (2003). 10.1063/1.1600519
    • (2003) J. Appl. Phys. , vol.94 , pp. 3675
    • Vurgaftman, I.1    Meyer, J.R.2
  • 62
    • 77954191204 scopus 로고    scopus 로고
    • private communication (November)
    • M. Higashiwaki, private communication (November 2009).
    • (2009)
    • Higashiwaki, M.1


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