Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation

Journal of Micromechanics and Microengineering

Volumn 20, Issue 7, 2010, Pages

  Ishida, T ^a   Nakajima, Y ^a,d   Kakushima, K ^b   Mita, M ^c   Toshiyoshi, H ^a   Fujita, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^d CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION PROCESS; DIRECT OBSERVATION; FUSION BONDING; GOLD NANOCONTACT; HOMOGENEOUS AND HETEROGENEOUS MATERIAL; IN-SITU EXPERIMENTS; IN-SITU TEM; MEMS/NEMS; NANO SCALE; NANO-INTERFACE; NANO-METER SCALE; NANOCONTACTS; TEM; TEM OBSERVATIONS;

DEFORMATION; EXPERIMENTS; FABRICATION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

GOLD;

EID: 77953901717     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/7/075011     Document Type: Article

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