High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements

Review of Scientific Instruments

Volumn 76, Issue 4, 2005, Pages

  Yu, Ning ^a   Bonin, Wayne A ^b   Polycarpou, Andreas A ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b Nanodyne Measurement Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FORCE MEASUREMENTS; ELECTRONIC CIRCUITRY; LOAD-DISPLACEMENT TRANSDUCERS; NANOINDENTATION;

ADHESION; ATOMIC FORCE MICROSCOPY; CAPACITANCE; ELECTROSTATICS; FORCE MEASUREMENT; FRICTION; MICROELECTROMECHANICAL DEVICES; THIN FILMS;

TRANSDUCERS;

EID: 17644417090     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1878532     Document Type: Article

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