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Materials Science and Engineering: B

Volumn 171, Issue 1-3, 2010, Pages 99-103

Properties of doped ZnO thin films grown by simultaneous dc and RF magnetron sputtering

(1) Sahu, D R a

a NRF Center of Excellence in Strong Materials (South Africa)

Author keywords

Coatings; Electrical and optical properties; Sputtering; ZnO

Indexed keywords

COPPER; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; SILVER COMPOUNDS; THIN FILMS;

AG DOPED; CU-DOPED; D.C. MAGNETRON SPUTTERING; DOPED ZNO; DOPED ZNO THIN FILMS; ELECTRICAL AND OPTICAL PROPERTIES; PROPERTY; R.F. MAGNETRON SPUTTERING; SPUTTERING; ZNO FILMS;

ZINC OXIDE;

EID: 77953137593 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2010.03.080 Document Type: Article

Times cited : (18)

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