Straight SU-8 pins

Journal of Micromechanics and Microengineering

Volumn 20, Issue 5, 2010, Pages

  Safavieh, R ^a   Pla Roca, M ^a   Qasaimeh, M A ^a   Mirzaei, M ^a   Juncker, D ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; FREE-STANDING STRUCTURES; HIGH RESOLUTION; INTERNAL STRESS; MECHANICAL CLAMPING; MICROFABRICATED; NEW DESIGN; POLYMER MICROSTRUCTURES; POST PROCESSING; POTENTIAL APPLICATIONS; PRINTING PROCESS; PROTEIN MICROARRAY; PROTEIN SPOTS; STEEL PINS; STOP VALVES; SU-8 STRUCTURE; TEMPERATURE RAMPING;

BIOASSAY; BIOCHIPS; CAPILLARITY; PRINTING; PROTEINS; STRESSES; SUBSTRATES; SURFACE CHEMISTRY;

FABRICATION;

EID: 77951994708     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/5/055001     Document Type: Article

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