Microfabrication of ultra-long reinforced silicon neural electrodes

Micro and Nano Letters

Volumn 4, Issue 1, 2009, Pages 53-58

  Hajj Hassan, M ^a   Chodavarapu, V P ^a   Musallam, S ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE WIDTHS; DRY-ETCH; ELECTRODE STRUCTURES; FABRICATION PROCESS; MASS-PRODUCIBLE; MICROFABRICATION PROCESS; NEURAL RECORDINGS; NEW HIGHS; NOVEL CONCEPTS; PROBE ELECTRODES; SILICON ELECTRODES; SILICON MICROFABRICATION; SILICON PROBES; SILICON SUBSTRATES; STRUCTURAL REINFORCEMENTS; SUBSTRATE MATERIALS; ULTRA-THIN SILICONS; XENON DIFLUORIDE;

CARBON NANOTUBES; ELECTRODES; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NONMETALS; PROBES; REINFORCEMENT; SEMICONDUCTING SILICON COMPOUNDS; XENON;

SILICON WAFERS;

SILICON; UNCLASSIFIED DRUG; XENON; XENON DIFLUORIDE;

ARTICLE; BRAIN DEPTH STIMULATION; COST EFFECTIVENESS ANALYSIS; ELECTRODE; FINITE ELEMENT ANALYSIS; MICROELECTRODE; NANOTECHNOLOGY; NEURAL PROBE ARRAY; TENSILE STRENGTH;

EID: 63349092610     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl:20090007     Document Type: Article

References (21)

1. Taylor, D.M., Tillery, S.I.H., and Schwartz, A.B.: ' Direct cortical control of 3D neuroprosthetic devices ', Science, 2002, 296, p. 1829-1832 0036-8075
2. Najafi, K.: ' Micromachined systems for neurophysiological applications ', Handbook of microlithography, micromachining and microfabrication', Volume II: Micromachining and microfabrication, (SPIE Press Monograph, London, 1997)
3. Hajj-Hassan, M., Chodavarapu, V., and Musallam, S.: ' NeuroMEMS: neural probe microtechnologies ', Sensors, 2008, 8, p. 6704-6726 0746-9462
4. Wise, K.D., and Najafi, K.: ' Microfabrication techniques for integrated sensors and microsystems ', Science, 1991, 254, p. 1335-1342 0036-8075
5. Pearce, T.M., and Williams, J.C.: ' Microtechnology: meet neurobiology ', Lab. Chip., 2007, 7, p. 30-40 1473-0197
6. Ji, J., Najafi, K., and Wise, K.D.: ' A scaled electronically- configurable multichannel recording array ', Sens. Actuators A - Phys., 1990, 22, p. 589-591
7. Olsson, R.H., Buhl, D.L., Sirota, A.M., Buzsaki, G., and Wise, K.D.: ' Band-tunable and multiplexed integrated circuits for simultaneous recording and stimulation with microelectrode arrays ', IEEE Trans. Biomed. Eng., 2005, 52, p. 1303-1311 0018-9294
8. Muthuswamy, J., Okandan, M., Jain, T., and Gilletti, A.: ' Electrostatic microactuators for precise positioning of neural microelectrodes ', IEEE Trans. Biomed. Eng., 2005, 52, p. 1748-1755 0018-9294
9. Donoghue, J.P.: ' Connecting cortex to machines: recent advances in brain interfaces ', Nat. Neurosci., 2002, 5, p. 1085-1088 1097-6256
10. Serruya, M.D., Hatsopoulos, N.G., Paninski, L., Fellows, M.R., and Donoghue, J.P.: ' Instant neural control of a movement signal ', Nature, 2002, 416, p. 141-142 0028-0836
11. Carmena, J.M., Lebedev, M.A., and Crist, R.E.: et al. ' Learning to control a brain-machine interface for reaching and grasping by primates ', PLoS Biol., 2003, 1, p. 193-208
12. Musallam, S., Corneil, B.D., Greger, B., Scherberger, H., and Andersen, R.A.: ' Cognitive control signals for neural prosthetics ', Science, 2004, 305, p. 258-262 0036-8075
13. Pesaran, B., Musallam, S., and Andersen, R.A.: ' Cognitive neural prosthetics ', Curr. Biol., 2006, 16, p. R77-R80
14. Rousche, P.J., and Normann, R.A.: ' Chronic recording capability of the Utah Intracortical Electrode Array in cat sensory cortex ', J. Neurosci. Meth., 1998, 82, p. 1-15
15. Wise, K.D., Anderson, D.J., Hetke, J.F., Kipke, D.R., and Najafi, K.: ' Wireless implantable microsystems: high-density electronic interfaces to the nervous system ', Proc. IEEE, 2004, 92, p. 76-97 0018-9219
16. Norlin, P., Kindlundh, M., Mouroux, A., Yoshida, K., and Hofmann, U.G.: ' A 32-site neural recording probe fabricated by DRIE of SOI substrates ', J. Micromech. Microeng., 2002, 12, p. 414-419 0960-1317
17. Wilson, C.J., and Beck, P.A.: ' Fracture testing of bulk silicon microcantilever beams subjected to a side load ', J. Microelectromech. Syst., 1996, 5, p. 142-150 1057-7157
18. Hoffman, E., Warneke, B., Kruglick, E., Weigold, J., and Pister, K.S.J.: ' 3D Structures with piezoresistive sensors in standard CMOS ', Proc. IEEE Micro Electro Mechanical Systems Conf., Amsterdam, The Netherlands, 1995, p. 228-293
19. Musallam, S., Martin, J.B., Philip, R.T., and Richard, A.A.: ' A floating metal microelectrode array for chronic implantation ', J. Neurosci. Meth., 2007, 160, p. 122-127
20. Pearson, G.L., Read, W.T., and Feldman, W.L.: ' Deformation and fracture of small silicon crystals ', Acta Metall., 1957, 5, p. 181-191 0001-6160
21. Najafi, K., and Hetke, J.F.: ' Strength characterization of silicon microprobes in neurophysiological tissues ', IEEE Trans. Biomed. Eng., 1990, 37, p. 474-481 0018-9294