Surface micromachining technology with two SU-8 structural layers and sol-gel, SU-8 or SiO2/sol-gel sacrificial layers

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages

  Conedera V ^a   Salvagnac, L ^a   Fabre, N ^a   Zamkotsian, F ^b   Camon, H ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MATERIALS SCIENCE; MICROMACHINING; SILICA; SOL-GEL PROCESS; THIN FILMS;

SOL-GEL SACRIFICIAL LAYERS; STRUCTURAL LAYERS;

SURFACE STRUCTURE;

EID: 34547659406     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/N02     Document Type: Article

References (24)

1. Fan L-S, Tai Y-C and Müller R S 1989 IC-processed electrostatic micromotors Sensors Actuators A 20 41-6
2. Camon H, Conedera V, Fabre N, Chovelon J-M, Martelet C and Belin M 1996 Non sticking layer for silicon micromotors MME'96 pp 105'8
3. Patel H 1992 Silicon that moves-towards the smart sensor IEE Rev. 38 268-2
4. Renard S 2000 Industrial MEMS on SOI J. Micromech. Microeng. 10 245-4
5. http://www.memsnet.org (CRONOS)
6. Chau K H L, Lewis S R, Zhao Y, Howe R T, Bart S F and Marcheselli R G 1996 An integrated force-balanced capacitive accelerometer for low-g applications Sensors Actuators A 54 472-4
7. Bagolini A, Pakula L, Scholtes T L M, Pham P J, French H T M and Sarro P M 2002 Polyimide sacrificial layer and novel materials for post-processing surface micromachining J. Micromech. Microeng. 12 385-5
8. Chen J, Engel J and Liu C 2003 Development of polymer-based haircell using surface micromachining and 3D assembly Transducers'03 pp 1035-5
9. Wang X Q, Lin Q and Tai Y C 1999 A parylene micro check valve MEMS'99 pp 177-5
10. Voskerician G, Shive M S, Shawgo R S, von Recim H, Anderson J M, Cima M J and Langer R 2003 Biocompatibility and biofouling of MEMS drug delivery devices J. Biomater. 24 1959-67
11. Chen W, L'Hereec F, Sasaki I and Janata J 2003 High-aspect ratio permanent photomask for solid-state chemical sensing array Thin Solid Film 444 241-4
12. http://www.gersteltec.ch
13. Chuang Y J, Tseng F G, Cheng J H and Lin W K 2003 A novel fabrication method of embedded micro-channels by using SU-8 thick film photoresists Sensors Actuators A 103 64-5
14. Jiguet S, Judelewicz M, Mischler S, Bertch A and Renaud P 2006 Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts Microelectron. Eng. 83 1273-6
15. Tay F E H, van Kan J A, Watt F and Choong W O 2001 A novel micro-machining method for the fabrication of thick film SU-8 embedded micro-channels J. Micromech. Microeng 11 27-6
16. Yu H, Balogun O, Li B, Murray T W and Zhang X 2004 Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique J. Micromech. Microeng. 14 1576-9
17. Jiguet S, Bertsch A, Judelewicz M, Hofmann H and Renaud P 2006 SU-8 nanocomposite photoresist with low stress properties for microfabrication applications Microelectron. Eng. 83 1966-4
18. Abgrall P, Lattes C, Conédéra V, Colin S and Gué A-M 2006 A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 film J. Micromech. Microeng. 16 113-8
19. Guérin J L, Bossel M, Demierre M, Calmes S and Renaud Ph 1997 Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic Transducers'97 pp 1419-21
20. Joseph P J, Kelleher H A, Bidstrup Allen S A and Kohl P A 2005 Improved fabrication of micro air-channels by incorporation of a structural barrier J. Micromech. Microeng. 15 35-8
21. http://www.microchem.com/products/pdf
22. Liotard A, Zamkotsian F, Conédéra V, Fabre N, Lanzoni P, Camon H and Chazallet F 2006 Polymer based micro deformable mirror for adaptative optics MEMS-MOEMS'06 pp 50-62
23. Zamkotsian F, Conédéra V, Liotard A, Schröder A, Fabre N, Camon H and Lanzoni P 2005 Polymer based micro deformable mirror for adaptative optics applications MOEMS-MEMS'05 pp 80-11
24. Perat O 2002 Méthodologie de caractérisation de paramètres thermomécaniques de matériaux pour la microélectronique PhD Institut National des Sciences Appliquées de Toulouse p 161