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Volumn 13, Issue 6, 2010, Pages

Ozone-based metal oxide atomic layer deposition: Impact of N2 / O2 supply ratio in ozone generation

(10) Delabie, Annelies a Caymax, Matty a Gielis, Sven a Maes, Jan Willem b Nyns, Laura a Popovici, Mihaela a Swerts, Johan a Tielens, Hilde a Peeters, Jozef c Van Elshocht, Sven a

a IMEC (Belgium)

b ASM BELGIUM (Belgium)

c UNIVERSITY OF LEUVEN (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC BARRIER DISCHARGES; FLOW RATIOS; GROWTH PER CYCLE; HOT WALL; METAL OXIDES; METAL PRECURSOR; NEGATIVE IMPACTS; OZONE GENERATION; TEMPERATURE WINDOW;

GROWTH (MATERIALS); METALLIC COMPOUNDS; OZONE;

HAFNIUM COMPOUNDS;

EID: 77951179923 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.3355207 Document Type: Article

Times cited : (17)

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