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Volumn 178-179, Issue C, 2010, Pages 268-272

Total reflection X-ray photoelectron spectroscopy: A review

Author keywords

Glancing incidence; Grazing incidence; Total reflection; X ray photoelectron spectroscopy

Indexed keywords

GLANCING INCIDENCE; GRAZING INCIDENCE; HISTORICAL DEVELOPMENT; INELASTIC MEAN FREE PATH; INTERFERENCE EFFECTS; TOTAL REFLECTION;

EID: 77951023168     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2009.12.001     Document Type: Review
Times cited : (19)

References (79)
  • 1
    • 77951022347 scopus 로고    scopus 로고
    • JEOL Application Note, XP27
    • in Japanese
    • Y. Iijima, JEOL Application Note, XP27 (1996) (in Japanese).
    • Iijima, Y.1
  • 16
    • 77951024190 scopus 로고
    • Doctor Thesis, Lund University
    • W. Stenström, Doctor Thesis, Lund University, 1919.
    • (1919)
    • Stenström, W.1
  • 19
    • 77951024285 scopus 로고    scopus 로고
    • Surface chemical analysis-determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy; ISO 17331:2004: Surface chemical analysis-chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
    • ISO 14706
    • ISO 14706:2000: Surface chemical analysis-determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy; ISO 17331:2004: Surface chemical analysis-chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy.
    • (2000)
  • 23
    • 77951022553 scopus 로고
    • Ultrasoft X-Ray Bragg and Specular Reflection: The Effects of Anomalous Dispersion, AD/A-004 157
    • August
    • B.L. Henke, R.C. Perera, R.H. Ono, Ultrasoft X-Ray Bragg and Specular Reflection: The Effects of Anomalous Dispersion, AD/A-004 157, NIST, August, 1974.
    • (1974) NIST
    • Henke, B.L.1    Perera, R.C.2    Ono, R.H.3
  • 43
    • 77951024005 scopus 로고
    • United States Patent No. 5,280,176, January 18
    • T.J. Jach, S.M. Thurgate, United States Patent No. 5,280,176, January 18, 1994.
    • (1994)
    • Jach, T.J.1    Thurgate, S.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.