-
1
-
-
77951022347
-
JEOL Application Note, XP27
-
in Japanese
-
Y. Iijima, JEOL Application Note, XP27 (1996) (in Japanese).
-
-
-
Iijima, Y.1
-
16
-
-
77951024190
-
-
Doctor Thesis, Lund University
-
W. Stenström, Doctor Thesis, Lund University, 1919.
-
(1919)
-
-
Stenström, W.1
-
19
-
-
77951024285
-
Surface chemical analysis-determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy; ISO 17331:2004: Surface chemical analysis-chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
-
ISO 14706
-
ISO 14706:2000: Surface chemical analysis-determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy; ISO 17331:2004: Surface chemical analysis-chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy.
-
(2000)
-
-
-
21
-
-
77951024710
-
-
Kawai J., Hayakawa S., Suzuki S., Kitajima Y., Urai T., Maeda K., and Gohshi Y. RIKEN Accel. Prog. Rep. 26 (1992) 127
-
(1992)
RIKEN Accel. Prog. Rep.
, vol.26
, pp. 127
-
-
Kawai, J.1
Hayakawa, S.2
Suzuki, S.3
Kitajima, Y.4
Urai, T.5
Maeda, K.6
Gohshi, Y.7
-
23
-
-
77951022553
-
Ultrasoft X-Ray Bragg and Specular Reflection: The Effects of Anomalous Dispersion, AD/A-004 157
-
August
-
B.L. Henke, R.C. Perera, R.H. Ono, Ultrasoft X-Ray Bragg and Specular Reflection: The Effects of Anomalous Dispersion, AD/A-004 157, NIST, August, 1974.
-
(1974)
NIST
-
-
Henke, B.L.1
Perera, R.C.2
Ono, R.H.3
-
24
-
-
77951022968
-
Region, Lorence Berkeley Laboratory, LBL-26259, UC-411
-
Factors for 92 Elements in 10-10,000 eV, November
-
B.L. Henke, J.C. Davis, E.M. Gullikson, R.C.C. Perera, A Preliminary Report on X-Ray Photoelectron Coefficients and Atomic Scattering Factors for 92 Elements in 10-10,000 eV Region, Lorence Berkeley Laboratory, LBL-26259, UC-411, November, 1988.
-
(1988)
A Preliminary Report on X-Ray Photoelectron Coefficients and Atomic Scattering
-
-
Henke, B.L.1
Davis, J.C.2
Gullikson, E.M.3
Perera, R.C.C.4
-
26
-
-
3743086676
-
-
Fadley C.S., Baird R.J., Siekhaus W., Novakov T., and Bergström S.A.L. J. Electron Spectrosc. 4 (1974) 93
-
(1974)
J. Electron Spectrosc.
, vol.4
, pp. 93
-
-
Fadley, C.S.1
Baird, R.J.2
Siekhaus, W.3
Novakov, T.4
Bergström, S.A.L.5
-
31
-
-
0003328069
-
-
Hill J.M., Royce D.G., Fadley C.S., Wagner L.F., and Grunthaner F.J. Chem. Phys. Lett. 44 (1976) 225
-
(1976)
Chem. Phys. Lett.
, vol.44
, pp. 225
-
-
Hill, J.M.1
Royce, D.G.2
Fadley, C.S.3
Wagner, L.F.4
Grunthaner, F.J.5
-
35
-
-
0026886511
-
-
Kawai J., Takami M., Fujinami M., Hashiguchi Y., Hayakawa S., and Gohshi Y. Spectrochim. Acta Part B 47 (1992) 983
-
(1992)
Spectrochim. Acta Part B
, vol.47
, pp. 983
-
-
Kawai, J.1
Takami, M.2
Fujinami, M.3
Hashiguchi, Y.4
Hayakawa, S.5
Gohshi, Y.6
-
36
-
-
0041689190
-
-
3238
-
Kawai J., Hayakawa S., Suzuki S., Kitajima Y., Takata Y., Urai T., Maeda K., Fujinami M., Hashiguchi Y., and Gohshi Y. Appl. Phys. Lett. 63 (1993) 269 3238
-
(1993)
Appl. Phys. Lett.
, vol.63
, pp. 269
-
-
Kawai, J.1
Hayakawa, S.2
Suzuki, S.3
Kitajima, Y.4
Takata, Y.5
Urai, T.6
Maeda, K.7
Fujinami, M.8
Hashiguchi, Y.9
Gohshi, Y.10
-
37
-
-
85008071083
-
-
Kawai J., Hayakawa S., Kitajima Y., Suzuki S., Maeda K., Urai T., Adachi H., Takami M., and Gohshi Y. Proc. Jpn. Acad. B 69 (1993) 179
-
(1993)
Proc. Jpn. Acad. B
, vol.69
, pp. 179
-
-
Kawai, J.1
Hayakawa, S.2
Kitajima, Y.3
Suzuki, S.4
Maeda, K.5
Urai, T.6
Adachi, H.7
Takami, M.8
Gohshi, Y.9
-
43
-
-
77951024005
-
-
United States Patent No. 5,280,176, January 18
-
T.J. Jach, S.M. Thurgate, United States Patent No. 5,280,176, January 18, 1994.
-
(1994)
-
-
Jach, T.J.1
Thurgate, S.M.2
-
47
-
-
0004151714
-
-
Bullis W.M., Seiler D.G., and Diebold A.C. (Eds), AIP, New York
-
Jach T., Thursgate S., and LaCuesta T. In: Bullis W.M., Seiler D.G., and Diebold A.C. (Eds). Semiconductor Characterization: Present Status and Future Need (1996), AIP, New York 283
-
(1996)
Semiconductor Characterization: Present Status and Future Need
, pp. 283
-
-
Jach, T.1
Thursgate, S.2
LaCuesta, T.3
-
51
-
-
77951024364
-
-
D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, E.M. Secula Eds, American Institute of Physics
-
E. Landree, T. Jach, D. Brady, A. Karemcheti, J. Canterbury, W. Chism, A.C. Diebold, in: D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, E.M. Secula (Eds.), Characterization and Metrology for ULSI Technology: 2000 International Conference, CP550, American Institute of Physics, 2001, pp. 159-163.
-
(2001)
Characterization and Metrology for ULSI Technology: 2000 International Conference, CP550
, pp. 159-163
-
-
Landree, E.1
Jach, T.2
Brady, D.3
Karemcheti, A.4
Canterbury, J.5
Chism, W.6
Diebold, A.C.7
-
52
-
-
1142289739
-
-
Jach T., Dura J.A., Nguyen N.V., Swider J., Cappello G., and Richter C. Surf. Interf. Anal. 36 (2004) 23
-
(2004)
Surf. Interf. Anal.
, vol.36
, pp. 23
-
-
Jach, T.1
Dura, J.A.2
Nguyen, N.V.3
Swider, J.4
Cappello, G.5
Richter, C.6
-
53
-
-
0029546120
-
-
Kawai J., Kawato S., Hayashi K., Horiuchi T., Matsushige K., and Kitajima Y. Appl. Phys. Lett. 67 (1995) 3889
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 3889
-
-
Kawai, J.1
Kawato, S.2
Hayashi, K.3
Horiuchi, T.4
Matsushige, K.5
Kitajima, Y.6
-
54
-
-
0041353183
-
-
(in Japanese)
-
Hayashi K., Kawai J., Kawato S., Horiuchi T., Matsushige K., and Kitajima Y. Adv. X-ray Chem. Anal. Jpn. 28 (1997) 45 (in Japanese)
-
(1997)
Adv. X-ray Chem. Anal. Jpn.
, vol.28
, pp. 45
-
-
Hayashi, K.1
Kawai, J.2
Kawato, S.3
Horiuchi, T.4
Matsushige, K.5
Kitajima, Y.6
-
55
-
-
0042356504
-
-
Kawai J., Hayakawa S., Kitajima Y., Maeda K., and Gohshi Y. J. Electron Spectrosc. Relat. Phenom. 76 (1995) 313
-
(1995)
J. Electron Spectrosc. Relat. Phenom.
, vol.76
, pp. 313
-
-
Kawai, J.1
Hayakawa, S.2
Kitajima, Y.3
Maeda, K.4
Gohshi, Y.5
-
56
-
-
0030130174
-
-
Hayashi K., Kawato S., Horiuchi T., Matsushige K., Kitajima Y., and Kawai J. Appl. Phys. Lett. 68 (1996) 1921
-
(1996)
Appl. Phys. Lett.
, vol.68
, pp. 1921
-
-
Hayashi, K.1
Kawato, S.2
Horiuchi, T.3
Matsushige, K.4
Kitajima, Y.5
Kawai, J.6
-
57
-
-
0042856046
-
-
(in Japanese)
-
Hayashi K., Kawai J., Kawato S., Horiuchi T., Matsushige K., Takenaka H., and Kitajima Y. Adv. X-ray Chem. Anal. Jpn. 28 (1997) 53 (in Japanese)
-
(1997)
Adv. X-ray Chem. Anal. Jpn.
, vol.28
, pp. 53
-
-
Hayashi, K.1
Kawai, J.2
Kawato, S.3
Horiuchi, T.4
Matsushige, K.5
Takenaka, H.6
Kitajima, Y.7
-
58
-
-
1542611709
-
-
Kawai J., Adachi H., Kitajima Y., Maeda K., Hayakawa S., and Gohshi Y. J. Surf. Anal. 2 (1996) 132
-
(1996)
J. Surf. Anal.
, vol.2
, pp. 132
-
-
Kawai, J.1
Adachi, H.2
Kitajima, Y.3
Maeda, K.4
Hayakawa, S.5
Gohshi, Y.6
-
59
-
-
0031313580
-
-
Kawai J., Adachi H., Kitajima Y., Maeda K., Hayakawa S., and Gohshi Y. Anal. Sci. 13 (1997) 797
-
(1997)
Anal. Sci.
, vol.13
, pp. 797
-
-
Kawai, J.1
Adachi, H.2
Kitajima, Y.3
Maeda, K.4
Hayakawa, S.5
Gohshi, Y.6
-
60
-
-
0031165120
-
-
Kawai J., Amano H., Hayashi K., Horiuchi T., Matsushige K., and Kitajima Y. Spectrochim. Acta Part B 52 (1997) 873
-
(1997)
Spectrochim. Acta Part B
, vol.52
, pp. 873
-
-
Kawai, J.1
Amano, H.2
Hayashi, K.3
Horiuchi, T.4
Matsushige, K.5
Kitajima, Y.6
-
62
-
-
0043140202
-
-
Kawai J., Hayashi K., Amano H., Takenaka H., and Kitajima Y. J. Electron Spectrosc. Relat. Phenom. 88-91 (1998) 787
-
(1998)
J. Electron Spectrosc. Relat. Phenom.
, vol.88-91
, pp. 787
-
-
Kawai, J.1
Hayashi, K.2
Amano, H.3
Takenaka, H.4
Kitajima, Y.5
-
63
-
-
0346395712
-
-
Kawai J., Sai M., Sugimura T., Hayashi K., Takenaka H., and Kitajima Y. X-ray Spectrom. 28 (1999) 519
-
(1999)
X-ray Spectrom.
, vol.28
, pp. 519
-
-
Kawai, J.1
Sai, M.2
Sugimura, T.3
Hayashi, K.4
Takenaka, H.5
Kitajima, Y.6
-
65
-
-
0032672729
-
-
Mayusumi M., Imai M., Takahashi J., Kawada K., and Ohmi T. J. Electrochem. Soc. 146 (1999) 2235
-
(1999)
J. Electrochem. Soc.
, vol.146
, pp. 2235
-
-
Mayusumi, M.1
Imai, M.2
Takahashi, J.3
Kawada, K.4
Ohmi, T.5
-
66
-
-
0032590889
-
-
Yamagishi H., Kuramoto M., Shiraishi Y., Machida N., Takano K., Takase N., Iida T., Matsubara J., Minami H., Imai M., and Takada K. Microelectron. Eng. 45 (1999) 101
-
(1999)
Microelectron. Eng.
, vol.45
, pp. 101
-
-
Yamagishi, H.1
Kuramoto, M.2
Shiraishi, Y.3
Machida, N.4
Takano, K.5
Takase, N.6
Iida, T.7
Matsubara, J.8
Minami, H.9
Imai, M.10
Takada, K.11
-
70
-
-
42449160299
-
-
Nagoshi M., Kawano T., Makiishi N., Baba Y., and Kobayashi K. Surf. Interf. Anal. 40 (2008) 738
-
(2008)
Surf. Interf. Anal.
, vol.40
, pp. 738
-
-
Nagoshi, M.1
Kawano, T.2
Makiishi, N.3
Baba, Y.4
Kobayashi, K.5
|