SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Electron Spectroscopy and Related Phenomena

Volumn 88-91, Issue , 1998, Pages 787-791

Surface analysis of Si/W multilayer using total reflection X-ray photoelectron spectroscopy

(5) Kawai, Jun a Hayashi, Kouichi a Amano, Hiroyuki a Takenaka, Hisataka b Kitajima, Yoshinori c

a KYOTO UNIVERSITY (Japan)

b NTT CORPORATION (Japan)

c INSTITUTE OF MATERIALS STRUCTURE SCIENCE (Japan)

Author keywords

Grazing incidence X rays; Surface analysis; Total reflection X rays; X ray multilayer optics

Indexed keywords

EID: 0043140202 PISSN: 03682048 EISSN: None Source Type: Journal
DOI: 10.1016/s0368-2048(97)00207-7 Document Type: Article

Times cited : (4)

References (29)

1
- 4243345378
- Total Reflection X-Ray Fluorescence Analysis
- D.K.G. de Boer, R. Klockenkämper (Eds.), Spectrochim. Acta, 52B(7), Special Issue, Total Reflection X-Ray Fluorescence Analysis (1997).
- (1997) Spectrochim. Acta , vol.52 B , Issue.7 SPEC. ISSUE
- De Boer, D.K.G.¹ Klockenkämper, R.²

2
- 0004252718
- John Wiley, New York
- R. Klockenkämper, Total-Reflection X-Ray Fluorescence Analysis, John Wiley, New York, 1997.
- (1997) Total-reflection X-ray Fluorescence Analysis
- Klockenkämper, R.¹

3
- 0000061137
- B.L. Henke, Phys. Rev. 95 (1954) 359.
- (1954) Phys. Rev. , vol.95 , pp. 359
- Henke, B.L.¹

4
- 0005217408
- M. Mehta, C.S. Fadley, Phys. Lett. 55A (1975) 59.
- (1975) Phys. Lett. , vol.55 A , pp. 59
- Mehta, M.¹ Fadley, C.S.²

5
- 0004121510
- M. Mehta, C.S. Fadley, Chem. Phys. Lett. 46 (1977) 225.
- (1977) Chem. Phys. Lett. , vol.46 , pp. 225
- Mehta, M.¹ Fadley, C.S.²

6
- 0000247013
- M.J. Chester, T. Jach, S. Thurgate, J. Vac. Sci. Technol. B11 (1993) 1609.
- (1993) J. Vac. Sci. Technol. , vol.B11 , pp. 1609
- Chester, M.J.¹ Jach, T.² Thurgate, S.³

7
- 0003977237
- M.J. Chester, T. Jach, Phys. Rev. B48 (1993) 17262.
- (1993) Phys. Rev. , vol.B48 , pp. 17262
- Chester, M.J.¹ Jach, T.²

8
- 0028368598
- T. Jach, M.J. Chester, S.M. Thurgate, Rev. Sci. Instrum. 65 (1994) 339.
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 339
- Jach, T.¹ Chester, M.J.² Thurgate, S.M.³

9
- 4243324225
- T. Jach, M.J. Chester, S.M. Thurgate, Nucl. Instrum. Methods Phys. Res. A347 (1994) 507.
- (1994) Nucl. Instrum. Methods Phys. Res. , vol.A347 , pp. 507
- Jach, T.¹ Chester, M.J.² Thurgate, S.M.³

10
- 0004151714
- W.M. Bullis, D.G. Seiler and A.C. Diebold (Eds.), AIP, New York
- T. Jach, S. Thurgate, T. LaCuesta, in: W.M. Bullis, D.G. Seiler and A.C. Diebold (Eds.), Semiconductor Characterization: Present Status and Future Needs, AIP, New York, 1996, p. 283.
- (1996) Semiconductor Characterization: Present Status and Future Needs , pp. 283
- Jach, T.¹ Thurgate, S.² LaCuesta, T.³

11
- 0042354954
- J. Kawai, S. Hayakawa, Y. Kitajima, Y. Gohshi, Adv. X-Ray Chem. Anal. Japan 26S (1995) 97.
- (1995) Adv. X-ray Chem. Anal. Japan , vol.26 S , pp. 97
- Kawai, J.¹ Hayakawa, S.² Kitajima, Y.³ Gohshi, Y.⁴

12
- 84996043404
- J. Kawai, S. Hayakawa, Y. Kitajima, Y. Gohshi, Anal. Sci. 11 (1995) 519.
- (1995) Anal. Sci. , vol.11 , pp. 519
- Kawai, J.¹ Hayakawa, S.² Kitajima, Y.³ Gohshi, Y.⁴

13
- 0029546120
- J. Kawai, S. Kawato, K. Hayashi, T. Horiuchi, K. Matsushige, Y. Kitajima, Appl. Phys. Lett. 67 (1995) 3889.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3889
- Kawai, J.¹ Kawato, S.² Hayashi, K.³ Horiuchi, T.⁴ Matsushige, K.⁵ Kitajima, Y.⁶

14
- 0042356504
- J. Kawai, S. Hayakawa, Y. Kitajima, K. Maeda, Y. Gohshi, J. Electron Spectrosc. Relat. Phenom. 76 (1995) 313.
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.76 , pp. 313
- Kawai, J.¹ Hayakawa, S.² Kitajima, Y.³ Maeda, K.⁴ Gohshi, Y.⁵

15
- 0030130174
- K. Hayashi, S. Kawato, T. Horiuchi, K. Matsushige, Y. Kitajima, H. Takenaka, J. Kawai, Appl. Phys. Lett. 68 (1996) 1921.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1921
- Hayashi, K.¹ Kawato, S.² Horiuchi, T.³ Matsushige, K.⁴ Kitajima, Y.⁵ Takenaka, H.⁶ Kawai, J.⁷

16
- 0031165120
- J. Kawai, H. Amano, K. Hayashi, T. Horiuchi, K. Matsushige, Y. Kitajima, Spectrochim. Acta B52 (1997) 873.
- (1997) Spectrochim. Acta , vol.B52 , pp. 873
- Kawai, J.¹ Amano, H.² Hayashi, K.³ Horiuchi, T.⁴ Matsushige, K.⁵ Kitajima, Y.⁶

17
- 0012958310
- H. Amano, J. Kawai, K. Hayashi, Y. Kitajima, Adv. X-Ray Chem. Anal. Japan 28 (1997) 31.
- (1997) Adv. X-ray Chem. Anal. Japan , vol.28 , pp. 31
- Amano, H.¹ Kawai, J.² Hayashi, K.³ Kitajima, Y.⁴

18
- 0041353183
- K. Hayashi, J. Kawai, S. Kawato, T. Horiuchi, K. Matsushige, Y. Kitajima, Adv. X-Ray Chem. Anal. Japan 28 (1997) 45.
- (1997) Adv. X-ray Chem. Anal. Japan , vol.28 , pp. 45
- Hayashi, K.¹ Kawai, J.² Kawato, S.³ Horiuchi, T.⁴ Matsushige, K.⁵ Kitajima, Y.⁶

19
- 0042856046
- K. Hayashi, J. Kawai, S. Kawato, T. Horiuchi, K. Matsushige, H. Takenaka, Y. Kitajima, Adv. X-Ray Chem. Anal. Japan 28 (1997) 53.
- (1997) Adv. X-ray Chem. Anal. Japan , vol.28 , pp. 53
- Hayashi, K.¹ Kawai, J.² Kawato, S.³ Horiuchi, T.⁴ Matsushige, K.⁵ Takenaka, H.⁶ Kitajima, Y.⁷

20
- 0031313580
- J. Kawai, H. Adachi, Y. Kitajima, K. Maeda, S. Hayakawa, Y. Gohshi, Anal. Sci. 13 (1997) 797.
- (1997) Anal. Sci. , vol.13 , pp. 797
- Kawai, J.¹ Adachi, H.² Kitajima, Y.³ Maeda, K.⁴ Hayakawa, S.⁵ Gohshi, Y.⁶

21
- 0026886511
- J. Kawai, M. Takami, M. Fujinami, Y. Hashiguchi, S. Hayakawa, Y. Gohshi, Spectrochim. Acta 47B (1992) 983.
- (1992) Spectrochim. Acta , vol.47 B , pp. 983
- Kawai, J.¹ Takami, M.² Fujinami, M.³ Hashiguchi, Y.⁴ Hayakawa, S.⁵ Gohshi, Y.⁶

22
- 0041853940
- K. Nisawa, K. Okuda, J. Surf. Anal. 1 (1995) 213.
- (1995) J. Surf. Anal. , vol.1 , pp. 213
- Nisawa, K.¹ Okuda, K.²

23
- 0042354956
- XP27
- Y. Iijima, JEOL Application Note, XP27, 1996.
- (1996) JEOL Application Note
- Iijima, Y.¹

24
- 0029368444
- H. Takenaka, T. Kawamura, T. Haga, H. Kinoshita, Jpn. J. Appl. Phys. 34 (1995) 5027.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 5027
- Takenaka, H.¹ Kawamura, T.² Haga, T.³ Kinoshita, H.⁴

25
- 0000631385
- Y. Kitajima, J. Electron Spectrosc. Relat. Phenom. 80 (1996) 405.
- (1996) J. Electron Spectrosc. Relat. Phenom. , vol.80 , pp. 405
- Kitajima, Y.¹

26
- 0042553279
- A. Savitzky, M.J.E. Golay, Anal. Chem. 36 (1964) 1627.
- (1964) Anal. Chem. , vol.36 , pp. 1627
- Savitzky, A.¹ Golay, M.J.E.²

27
- 0345591924
- J. Steinier, Y. Termonia, J. Deltour, Anal. Chem. 44 (1972) 1906.
- (1972) Anal. Chem. , vol.44 , pp. 1906
- Steinier, J.¹ Termonia, Y.² Deltour, J.³

28
- 13444285568
- D.K.G. de Boer, Phys. Rev. B44 (1991) 498.
- (1991) Phys. Rev. , vol.B44 , pp. 498
- De Boer, D.K.G.¹

29
- 0004932883
- B.L. Henke, E.M. Gullikson, J.C. Davis, Atomic Data Nucl. Data Tables 54 (1993) 181.
- (1993) Atomic Data Nucl. Data Tables , vol.54 , pp. 181
- Henke, B.L.¹ Gullikson, E.M.² Davis, J.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.