Optical and electrical properties of nanocrystal zinc oxide films prepared by dc magnetron sputtering at different sputtering pressures

Applied Surface Science

Volumn 256, Issue 16, 2010, Pages 5056-5060

  Tanuševski, Atanas ^a   Georgieva, Verka ^a  

^a SS CYRIL AND METHODIUS UNIVERSITY   (Macedonia)

Author keywords

Magnetron sputtering; Transmission spectra and sheet resistance; Zinc oxide films

Indexed keywords

ENERGY GAP; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; METALLIC FILMS; NANOCRYSTALS; SCANNING ELECTRON MICROSCOPY; SHEET RESISTANCE; SUBSTRATES; SURFACE RESISTANCE; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

DC MAGNETRON SPUTTERING; DC REACTIVE MAGNETRON SPUTTERING; NANO-CRYSTALLINE STRUCTURES; NANOCRYSTAL THIN FILMS; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMISSION SPECTRUM; SPUTTERING PRESSURES; TRANSMISSION SPECTRUMS;

OXIDE FILMS;

EID: 77950918301     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.03.059     Document Type: Article

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