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Thin Solid Films

Volumn 468, Issue 1-2, 2004, Pages 234-239

Highly stable hydrogenated gallium-doped zinc oxide thin films grown by DC magnetron sputtering using H2/Ar gas

(2) Takeda, Satoshi a Fukawa, Makoto a

a ASAHI GLASS CO LTD (Japan)

Author keywords

Hydrogen; SIMS; Sputtering; Zinc oxide

Indexed keywords

CARRIER CONCENTRATION; FILM GROWTH; GALLIUM; GRAIN SIZE AND SHAPE; HYDROGEN; HYDROGENATION; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR DOPING; ZINC OXIDE;

FILM SURFACE; HALL MOBILITY;

THIN FILMS;

EID: 4644231657 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.05.137 Document Type: Article

Times cited : (20)

References (15)

1
- 36549102198
- S. Major, S. Kumar, M. Bhatnagar, K.L. Chopra, Appl. Phys. Lett. 49 (1986) 394.
- (1986) Appl. Phys. Lett. , vol.49 , pp. 394
- Major, S.¹ Kumar, S.² Bhatnagar, M.³ Chopra, K.L.⁴

2
- 0000170470
- W. Wendt, K. Ellmer, K. Wiesemann, J. Appl. Phys. 82 (1997) 2115.
- (1997) J. Appl. Phys. , vol.82 , pp. 2115
- Wendt, W.¹ Ellmer, K.² Wiesemann, K.³

3
- 21644477594
- J. Hu, R.G. Gordon, J. Appl. Phys. 71 (1992) 880.
- (1992) J. Appl. Phys. , vol.71 , pp. 880
- Hu, J.¹ Gordon, R.G.²

4
- 0018495392
- J. Aranovich, A. Ortiz, R.H. Bubc, J. Vac. Sci. Technol. 16 (1979) 994.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 994
- Aranovich, J.¹ Ortiz, A.² Bubc, R.H.³

5
- 36449004461
- Y. Igasaki, H. Saito, J. Appl. Phys. 69 (1991) 2190.
- (1991) J. Appl. Phys. , vol.69 , pp. 2190
- Igasaki, Y.¹ Saito, H.²

6
- 0242366996
- Maastricht, Netherlands
- J. Ebisawa, K. Sato, A. Mitsui, S. Takeda, Proceedings of 3rd International Conference on Coating on Glass, 2000, p. 751, Maastricht, Netherlands.
- (2000) Proceedings of 3rd International Conference on Coating on Glass , pp. 751
- Ebisawa, J.¹ Sato, K.² Mitsui, A.³ Takeda, S.⁴

7
- 0026139998
- Y. Shigesato, Y. Hayashi, A. Masui, T. Haranoh, Jpn. J. Appl. Phys. 30 (1993) 814.
- (1993) Jpn. J. Appl. Phys. , vol.30 , pp. 814
- Shigesato, Y.¹ Hayashi, Y.² Masui, A.³ Haranoh, T.⁴

8
- 0026385486
- T. Nakada, Y. Ohkubo, A. Kunioka, Jpn. J. Appl. Phys. 30 (1991) 3344.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 3344
- Nakada, T.¹ Ohkubo, Y.² Kunioka, A.³

9
- 35949015935
- I. Hamberg, C.G. Granqvist, K.-F. Berggren, B.E. Sernelius, L. Engström, Phys. Rev., B 30 (1984) 3240.
- (1984) Phys. Rev., B , vol.30 , pp. 3240
- Hamberg, I.¹ Granqvist, C.G.² Berggren, K.-F.³ Sernelius, B.E.⁴ Engström, L.⁵

10
- 0024641687
- J.A. Thornton, J. Tabock, D.W. Hoffman, Thin Solid Films 171 (1989) 5.
- (1989) Thin Solid Films , vol.171 , pp. 5
- Thornton, J.A.¹ Tabock, J.² Hoffman, D.W.³

11
- 0036819826
- M. Kon, P.K. Song, A. Mitsui, Y. Shigesato, Jpn. J. Appl. Phys. 41 (2002) 6174.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 6174
- Kon, M.¹ Song, P.K.² Mitsui, A.³ Shigesato, Y.⁴

12
- 33845434864
- K. Ishibashi, K. Hiratam, N. Hosokawa, J. Vac. Sci. Technol., A 8 (1990) 1403.
- (1990) J. Vac. Sci. Technol., A , vol.8 , pp. 1403
- Ishibashi, K.¹ Hiratam, K.² Hosokawa, N.³

13
- 18244430368
- C.G. Van de Walle, Phys. Rev. Lett. 85 (2000) 1012.
- (2000) Phys. Rev. Lett. , vol.85 , pp. 1012
- Van De Walle, C.G.¹

14
- 0037087351
- B. Theys, V. Sallet, F. Jomard, A. Lusson, J.-F. Rommeluere, Z. Teukam, J. Appl. Phys. 91.(2002) 3922.
- (2002) J. Appl. Phys. , vol.91 , pp. 3922
- Theys, B.¹ Sallet, V.² Jomard, F.³ Lusson, A.⁴ Rommeluere, J.-F.⁵ Teukam, Z.⁶

15
- 0037851988
- S.Y. Myong, K.S. Lim, Appl. Phys. Lett. 82 (2003) 3026.
- (2003) Appl. Phys. Lett. , vol.82 , pp. 3026
- Myong, S.Y.¹ Lim, K.S.²

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