Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cells

Solar Energy Materials and Solar Cells

Volumn 45, Issue 1, 1997, Pages 75-86

  Martinez M A ^a   Herrero, J ^a   Gutierrez M T ^a  

^a CIEMAT   (Spain)

Author keywords

Sputtered coatings; Thin film solar cells; Transparent conductors; ZnO

Indexed keywords

FILM PREPARATION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHOTOVOLTAIC EFFECTS; SEMICONDUCTING ZINC COMPOUNDS; SOLAR CELLS; SPUTTER DEPOSITION; THIN FILM DEVICES; ZINC OXIDE;

POLYCRYSTALLINE SOLAR CELL; SUBSTRATE TEMPERATURE; TRANSPARENT CONDUCTIVE ZINC OXIDE;

PHOTOVOLTAIC CELLS;

EID: 0030735113     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(96)00066-9     Document Type: Article

References (34)

1. J.B. Yoo, A.L. Fahrenbruch and R.H. Bube, J. Appl. Phys. 68 (1990) 4694.
2. S. Matsushima, D. Ikeda, K. Kobayashi and G. Okada, Chem Lett. 2 (1992) 323.
3. S. Takata, T. Minami and H. Nanto, Thin Solid Films 135 (1986) 183.
4. T. Minami, H. Nanto and S. Takata, Thin Solid Films 124 (1985) 43.
5. Z.C. Jin, J. Hamberg and C.G. Granqvist, J. Appl. Phys. 64 (1988) 5117.
6. S. Major, S. Kumar, M. Bhatnagar and K.L. Chopra, Appl. Phys. Lett. 49 (1986) 394.
7. L. Stolt, J. Hedström, J. Kassler, M. Ruckh, K.O. Velthaus and H.W. Schock, Appl. Phys. Lett. 62 (1993) 597.
8. K. Belghit, M.A. Subhan, U. Rülhe, S. Duchemin and J. Bougnot, 10th EC Photovoltaic Solar Energy Conference, Lisboa, Potugal, 1991, p. 613.
9. D.H. Zhang and D.E. Brodie, Thin Solid Films 238 (1994) 95.
10. M.A. Martínez, J. Herrero and M.T. Gutiérrez, 11th EC Photovoltaic Solar Energy Conf., Montreux, Switzerland, 1992, p. 913.
11. R.G. Gordon, J. Hu, C. Guinta and J. Musher, SERI Annual Report Photovoltaic Program Branch FY 1989, edited by K.A. Summers, Colorado, USA, 1990, p. 29.
12. V. Lujala, J. Skarp, M. Tammenmaa, T. Suntola and J. Wallinga, 12th EC Photovoltaic Solar Energy Conf., Amsterdam, The Netherlands, 1994, p. 1511.
13. M. de la Olvera, A. Maldonado, R. Asomoza, M. Konagai and M. Asomoza, Thin Solid Films 229 (1993) 196.
14. Md.N. Islam, B.K. Samantaray, K.L. Chopra and H.N. Acharya, Sol. Energy Mater. Sol. Cells 29 (1993) 27.
15. L.J. Meng and M.P. dos Santos, Thin Solid Films 250 (1994) 26.
16. K. Ellmer, F. Kudella, R. Mientus, R. Schieck and S. Fiechter, Appl. Surf. Sci. 70/71 (1993) 707.
17. M.A. Martínez, J. Herrero and M.T. Gutiérrez, Sol. Energy Mater. Sol. Cells 31 (1994) 489.
18. K. Ellmer, R. Wendt, K. Diesner and S. Fiechter, 12th EC Photovoltaic Solar Energy Conf., Amsterdam, The Netherlands, 1994, p. 1515.
19. K. Tominaga, T. Yuasa, M. Kume and O. Tada, Jpn. J. Appl. Phys. 24 (1985) 944.
20. K. Tominaga, K. Kudora and O. Tada, Jpn. J. Appl. Phys. 27 (1988) 1176.
21. T. Minami, K. Ohashi and S. Takata, Thin Solid Films 193/194 (1990) 721.
22. T. Minami, H. Sato, K. Ohashi, T. Tomofuji and S. Takata, J. Crystal Growth 117 (1992) 370.
23. R. Noufi, P. Souza and C. Osterwald, Solar Cells 15 (1985) 87.
24. R.E. Hollingsworth and J.R. Sites, Solar Cells 16 (1986) 457.
25. M.A. Martínez, Doctoral Thesis, Universidad Autónoma de Madrid (1994).
26. K.L. Chopra and S.K. Bahl, Phys. Rev. B 1 (1970) 2545.
27. J. Szcyrbowski, A. Dietrich and H. Hoffmann, Phys. Status Solid A 78 (1983) 243.
28. B. Dimler and H.W. Schock, 9th EC Photovoltaic Solar Energy Conf., Freiburg, Germany, 1989, p. 160.
29. J.M. Doña and J. Herrero, J. Electrochem. Soc. 139 (1992) 2810.
30. D.S.H. Chern, J.R. Phillips and J.C.H. Phang, Solid State Electronics 29 (1986) 339.
31. th EC Photovoltaic Solar Energy Conf., Amsterdam, The Netherlands, 1994, p. 1507.
32. M.A. Martínez, J. Herrero and M.T. Gutiérrez, 12th EC Photovoltaic Solar Energy Conf., Amsterdam, The Netherlands, 1994, p. 1503.
33. T. Minami, H. Sato, H. Imamoto and S. Takata, Jpn. J. Appl. Phys. 31 (1992) L257.
34. R.E.I. Schropp and A. Madan, J. Appl. Phys. 66 (1989) 2027.