High performance InGaN/GaN nanorod light emitting diode arrays fabricated by nanosphere lithography and chemical mechanical polishing processes

Optics Express

Volumn 18, Issue 8, 2010, Pages 7664-7669

  Chen, Liang Yi ^a   Huang, Ying Yuan ^a   Chang, Chun Hsiang ^a   Sun, Yu Hsuan ^a   Cheng, Yun Wei ^a   Ke, Min Yung ^a   Chen, Cheng Pin ^a   Huang, Jianjang ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICAL POLISHING; NANORODS; NANOSPHERES; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLISHING;

CHEMICAL-MECHANICAL POLISHING PROCESS; INJECTION CURRENT DENSITY; JUNCTION HEATING; LIGHT EMITTING DIODE ARRAYS; LIGHTEMITTING DIODE(LED) ARRAY; NANO SPHERE LITHOGRAPHY; NANOROD FORMATION; SIDEWALL PASSIVATION;

LIGHT EMITTING DIODES;

EID: 77950877431     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.007664     Document Type: Article

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