Absolute densities of N2(A3Σ+ u), N(4So), and N(2Do) in an inductively coupled nitrogen plasma source

Japanese Journal of Applied Physics

Volumn 49, Issue 2 Part 1, 2010, Pages

  Horikawa, Yoshimine ^a   Kurihara, Kazuaki ^b   Sasaki, Koichi ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE DENSITY; ACTIVE SPECIES; COLLISIONAL QUENCHING; DISCHARGE PRESSURES; INDUCTIVELY-COUPLED; LOSS FREQUENCY; RELEVANT REACTIONS; VACUUM ULTRAVIOLETS;

ABSORPTION SPECTROSCOPY; ELECTRIC DISCHARGES; ELECTROMAGNETIC INDUCTION; FREQUENCY ESTIMATION; ONTOLOGY; PLASMA SOURCES; REACTION RATES;

NITROGEN PLASMA;

EID: 77950822815     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.026101     Document Type: Article

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