Formation of aluminum nitride on aluminum surfaces by ECR nitrogen plasmas

Surface and Coatings Technology

Volumn 86-87, Issue PART 2, 1996, Pages 622-627

  Ebisawa, T ^a   Saikudo, R ^a  

^a JAPAN STEEL WORKS LTD   (Japan)

Author keywords

Aluminum nitride; Bi layer structure; ECR plasma treatment; Hard coating

Indexed keywords

EXPERIMENTS; HARD FACING; NITROGEN FIXATION; PLASMA APPLICATIONS; SURFACE PROPERTIES;

ALUMINUM NITRIDE; BI-LAYER STRUCTURE; HARD COATING; PLASMA TREATMENT;

ALUMINUM PLATING;

EID: 0030400620     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02967-2     Document Type: Article

References (11)

1. The Japan Research and Development Center for Metals, Aluminum-Gokin-no-Hyomen-Atsumaku-Koka-Gijutsu, The Forming Technology of A Thick and Hard Layer on Aluminum Alloy, in Japanese, Nikkan-Kogyo-shinbun, Tokyo, 1995, pp. 1-260.
2. H. Tachikawa, H. Fujita, M. Nakamura and T. Arai, J. Metal Finishing Soc. Japan, 39(7) (1988) 41.
3. E.I. Meletis and S. Yan, J. Vac. Sci. Technol., A 9(4) (1991) 2279.
4. H.-Y. Chen, H.-R. Stoch and P. Mayr, Surf. Coat. Technol., 64 (1994) 139.
5. T. Hino, I. Fujita and T. Yamashina, Bull. Faculty Eng. Hokkaido Univ., 161 (1992) 49.
6. K. Nomoto, S. Nishijima, K. Katagiri, M. Nunogaki, T. Nishiura, T. Okada, H. Mori and K. Iwamoto, Surf. Coat. Technol., 51 (1992) 157.
7. Y. Uemura, J. Metal Finishing Soc. Japan, 29(1) (1978) 10.
8. G. A. Slack and T. F. McNelly, J. Crystal Growth, 34 (1976) 263.
9. S. Hioki, J. Japan Soc. Heat Treatment, 24 (1984) 182.
10. S. Hirai and H. Katayama, Bull. Japan Inst. Metals., 29 (1990) 534.
11. M. Uda, S. Ohno and H. Okuyama, J. Ceram. Soc. Japan, 95(1) (1987) 76.