Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm

Review of Scientific Instruments

Volumn 70, Issue 1 PART II, 1999, Pages 76-81

  Sasaki, K ^a   Kawai, Y ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002726579     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149543     Document Type: Review

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