Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

Applied Physics Letters

Volumn 70, Issue 11, 1997, Pages 1375-1377

  Sasaki, K ^a   Kawai, Y ^a   Kadota, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000275533     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118582     Document Type: Article

References (12)

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