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Volumn 5, Issue 3, 1996, Pages 424-428
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Nitriding of zirconium and aluminium by using ECR nitrogen plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ARGON;
ELECTRIC DISCHARGES;
ELECTRON CYCLOTRON RESONANCE;
EMISSION SPECTROSCOPY;
ION BOMBARDMENT;
NITRIDING;
NITROGEN;
PLASMA SOURCES;
SPUTTERING;
ZIRCONIUM;
ELECTRON CYCLOTRON RESONANCE (ECR) PLASMA APPARATUS;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA APPLICATIONS;
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EID: 0030204901
PISSN: 09630252
EISSN: None
Source Type: Journal
DOI: 10.1088/0963-0252/5/3/010 Document Type: Article |
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Times cited : (27)
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References (10)
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