A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 229-232

  Kimura, Takashi ^a   Ohashi, Haruhiko ^b   Mimura, Hidekazu ^a   Yamakawa, Daisuke ^a   Yumoto, Hirokatsu ^b   Matsuyama, Satoshi ^a   Tsumura, Takashi ^c   Okada, Hiromi ^c   Masunaga, Tatsuhiko ^c   Senba, Yasunori ^b   Goto, Shunji ^b   Ishikawa, Tetsuya ^b,d   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^c JTEC Corporation   (Japan)

^d SPring 8/RIKEN ^*  (Japan)

Author keywords

Interferometric measurement; MSI; RADSI; X ray focusing; X ray mirror

Indexed keywords

ASPHERICAL SURFACE; FIZEAU INTERFEROMETERS; HIGH BRIGHTNESS; INTERFEROMETRIC MEASUREMENT; MEASUREMENT ACCURACY; MIRROR FIGURE; PRECISE MEASUREMENTS; REFLECTIVE OPTICS; STITCHING INTERFEROMETRY; SUBAPERTURE; SYNCHROTRON RADIATION FACILITY; X RAY MIRRORS; X-RAY FOCUSING;

LASER OPTICS; MIRRORS; X RAYS;

INTERFEROMETRY;

EID: 77950816058     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.11.014     Document Type: Article

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