Stitching interferometry for the wavefront metrology of X-ray mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4501, Issue , 2001, Pages 63-67

  Bray, Michael ^a  

^a MB Optique   (France)

Author keywords

Interferometry; Stitching interferometry; X ray optics

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT ERRORS; MIRRORS; SURFACE MEASUREMENT; WAVEFRONTS;

STITCHING INTERFEROMETRY; SURFACE SHAPE METROLOGY; WAVEFRONT METROLOGY; X RAY MIRRORS;

X RAY OPTICS;

EID: 0035766224     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448499     Document Type: Conference Paper

References (1)

1. SPIE International Symposium on Optical Science and Technology, San Diego 2001 - Paper 4451-40