Thin film aluminum alloy for movable electrical circuit

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 69, Issue 5, 2005, Pages 439-443

  Nishida, Hiroshi ^a   Tanaka, Hiroshi ^a   Murata, Takao ^a  

^a Departmen Sumitomo Precision Products Co   (Japan)

Author keywords

Aluminum alloy; Re crystalization; The micro electro mechanical system; Thin film; Yaw rate sensor

Indexed keywords

COARSE GRAINS; MICRO ELECTRO-MECHANICAL-SYSTEM (MEMS); SILICON SUBSTRATES; YAW RATE SENSORS;

ANNEALING; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; ELECTRIC RESISTANCE; GLASS; NETWORKS (CIRCUITS); NITROGEN; OXYGEN; RECRYSTALLIZATION (METALLURGY); SILICON COMPOUNDS; THIN FILMS;

ALUMINUM ALLOYS;

EID: 22444451216     PISSN: 00214876     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet.69.439     Document Type: Article

References (5)

1. Shinji Kobayashi: Jidousya Gijyutsu 56(2002) 99-100.
2. Toshiyuki Tsuchiya: R&D Review of Toyota CRDL 36(2001) 41-46.
3. Ian Hopkin: Symposium Gyro Technology (1997) 1-10.
4. Japanese Patent: Toku-Kai-Hei10-267667.
5. PCT International Patent: WO 2004/003936.