The lateral instability problem in electrostatic comb drive actuators: Modeling and feedback control

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1233-1241

  Borovic, B ^a   Lewis, F L ^a   Liu, A Q ^b   Kolesar, E S ^c   Popa, D ^a  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; CONTROL EQUIPMENT; ELECTRODES; ELECTROMECHANICAL DEVICES; FEEDBACK CONTROL; FINITE ELEMENT METHOD; SENSORS; STEERING;

ACTIVE TRAVELING RANGE; ELECTROSTATIC COMB DRIVE ACTUATORS; LATERAL INSTABILITY; MECHANICAL DESIGN;

ACTUATORS;

EID: 33745098639     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/017     Document Type: Article

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