Development of a micro-miniature nanoindentation instrument

10th Symposium on Recent Advancements in the Theory and Practice of Hardness Measurement 2007, HARDMEKO 2007

Volumn , Issue , 2007, Pages 13-16

  Li, Zhi ^a   Gao, Sai ^a   Herrmann, Konrad ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

MEMS; Micro miniature; Nano indentation

Indexed keywords

BATCH FABRICATION; COMB-DRIVE ACTUATOR; HIGH PRECISION; HIGH RESOLUTION; INDENTATION SYSTEM; LOW COSTS; LOW-POWER CONSUMPTION; MECHANICAL PROPERTIES OF MATERIALS; MECHANICAL SYSTEMS; MICRO-MINIATURE; NANO-INDENTATION INSTRUMENT;

CREEP TESTING; ELECTROSTATIC ACTUATORS; FABRICATION; INSTRUMENT TESTING; INSTRUMENTS; LOADING; MACHINE DESIGN; MEASUREMENTS; MECHANICAL PROPERTIES; MEMS; PLASTICITY TESTING;

INDENTATION;

EID: 77950209545     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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